【正文】 Technical Advisory BoardMTBAmean time between assistsMTBFmean time between failuresMTBFpmean (productive) time between failuresMTBImean time between interrupt。 mean time between incidentMTOLmean time off line。 mean time on lineMTSMaterial Tracking StandardMTTAmean time to assistMTTFmean time to failureMTTRmean time to repairMVmegavoltMVTRmoisture vapor transmission rateMWmolecular weightMWBCmean wafers between cleansMWTmonitor wafer turnerNnitrogenNasodiumNAnumerical apertureNCMSNational Center forNCSNetwork Communication StandardNDAnondisclosure agreementNDEnondestructive evaluationNDIRnondispersive infrared spectroscopyNDPneutron depth profilingNDTnondestructive testingNDUVnondispersive ultraviolet spectroscopyNECNational Electric CodeNESHAPNational Emissions Standards for Hazardous Air PollutantsNFOMnearfield optical microscopyNGLnextgeneration lithographyNinickelNILnanoimprint lithographyNIRAnearinfrared reflection analysisNMOSnegative channel metaloxidesemiconductorNMRnuclear magnetic resonanceNNneural networkNREnonrecurring engineeringNTRSNational Technology Roadmap for SemiconductorsNTUnephelometric turbidity unitNVRnonvolatile residueOoxygenOBAobject behavior analysisOBEMObjectBased Equipment ModelOBICoptical beaminduced currentOBLobjectbased languageOCopen cassetteOCRoptical character recognitionODoutside diameterODSozonedepleting substancesOEEoverall equipment effectivenessOEMoriginal equipment manufacturerOESoptical emission spectroscopyOHToverhead transport。 overhead hoist transportOHVoverhead vehicleOLoverlayOLBouter lead bondOLEobject linking and embeddingOMoperational modeling。 optical microscopyOMAobject management architectureOMSoptical mass spectroscopyOMTobject modeling techniqueOOobjectorientedOOAobjectoriented analysisOODobjectoriented designOODBobjectoriented databaseOODBMSobjectoriented database management systemOOPobjectoriented programmingOPCoptical particle counter。 optical proximity correctionOSoperating systemOSDorganic spinon dielectricOSFOpen Systems FoundationOSGorganosilicate glassOSIopen system interconnectionOSRMOffice of Standard Reference MaterialsOSSObject Services StandardOxoxidePphosphorousP/TprecisiontolerancePABpostapply bakePACphotoactive poundPACVDplasmaassisted chemical vapor depositionPAFTIRphotoacousticFourier transform infrared spectroscopyPAGphotoacid generatorPALprocess automation language。 programmable array logic。 process asset libraryPAMprocess application modulePASphotoacoustic spectroscopyPAWSportable acoustic wave sensorPbleadPBETPerformanceBased Equipment TrainingPBGAplastic ball grid arrayPBLpolybuffered LOCOSPBSphoton backscatteringPCpersonal puter。 programmable controller。 process controlPCADpackaging puteraided designPCBprinted circuit boardPCMPpostchemical mechanical polishingPCMSplasma chemistry MonteCarlo simulationPCOphotocatalytic oxidationPCRprinciple ponent regressionPCTprocess change teamPdpalladiumPDCpassive data collectionPDFportable document formatPDSOIpartially depleted silicon on insulatorPDUprotocol data unitPDVCphasedependent voltage contrastPEBpostexposure bakePECVDplasmaenhanced chemical vapor depositionPEDpostexposure delayPEDSplasmaenhanced deposition systemPEELSparallel electron energy loss spectrometryPELpermissible exposure levelPESphotoelectron spectroscopyPETpostetch treatmentPETEOSplasmaenhancedtetraethylorthosilicatePFAperfluoroalkoxyPFCperfluorocarbonPFPEperfluorinated polyetherPGApin grid arrayPGILDprojection gas immersion laser dopingPGVpersonguided vehiclePIproportional integralPIDproportional integral derivative。 processinduced defectPIIIplasma immersion ion implantationPINDparticle impact noise detectionPIPprocessinduced particlePIVpeak inverse voltage。 post indicator valvePLAprogrammable logic arrayPLCprogrammable logic controllerPLCCplastic leaded chip carrierPLLplasma lockloadPLSpartial least squares。 projection of latent structuresPLYphotolimited yieldPMprocess monitor。 preventive maintenance。 process modulePMCprocess module controllerPMCCPenskyMartens closed cupPMIphase measuring interferometerPMMApolymethyl methacrylatePMOSpositive channel metaloxide semiconductorPMSparticle measuring systemPMTphotomultiplier tubePMTFProduct Management Task ForcePORprocessofrecordPOUpointofusePOUCGpointofuse chemical generationPPEpersonal protective equipmentPPGAplastic pin grid arrayPPIDprocess program identificationPQFPplastic quad flat packPRASparticle reactor analysis servicesPRBpseudorandom binaryPRBSpseudorandom binary sequencePROMprogrammable readonly memoryPRSCparametric response surface controlPRVperson rail guided vehiclePSporous siliconPSBphaseshifting blankPSCporous silicon capacitorPSDpower spectral density。 port status displayPSGphosphosilicate glassPSIIplasma source ion implantationPSLpolystyrene latexPSLSpolystyrene latex spherePSMphaseshift maskPtplatinumPTABProject TechnicalAdvisory BoardPTCpre and postprocess treatment chambersPTFEpolytetrafluorethylenePVApolyvinylacetatePVCpolyvinylchloridePVDphysical vapor depositionPVDFpolyvinylidene fluoridePWBprinted wiring boardPWPparticles per wafer passQAquality assuranceQCquality controlQCMquartz crystal microbalancesQDRquick dump rinseQFDquality function deploymentQFPquad flat packageQMSqu