【正文】 LFLlower flammable limitLGQlinear Gaussian quadraticLilithiumLIlaser interferometryLIClinear integrated circuitLIDleadless inverted deviceLIFOlast inLIMAlaserinduced mass analysisLIMSlaserinduced mass spectrometryLLCCleadless chip carrierLLDlower limit of detectionLLNQleast lots next queueLMlight microscopeLMMAlaser microprobe mass analysisLOCOSlocal oxidation of siliconLOSloss of selectivityLPClinear predictive coding。 integrated systemsISCIndustry Steering CouncilISEMinspection/review specific equipment modelISMinductor super magnetronISMTInternational SEMATECHISPMin situ particle monitorISRin situ rinseISSion scattering spectroscopyITRIInterconnection TechnologyITRSInternational TechnologyIVHinterstitial via holeIVPintegrated vacuum processingJDPJoint Development ProgramJEDECJoint Electron Device Engineering CouncilJESSIJoint European Submicron Silicon InitiativeJICJoint Industrial CouncilJITjustintimeJJTJosephson junction transistorJVDjet vapor depositionKpotassium。 integrated metrologyIMDintermetal dielectricIMMAion microphobe mass analysisIMSion mobility spectroscopyInindiumINCAMSindividual cassette manufacturing systemIPAisopropyl alcoholIPLion projection lithographyIPTideal process timeIriridiumIRinfraredIRASinfrared reflectionabsorption spectroscopyIRISimaging of radicals interacting with surfacesIRNinternal recurrent neural networkIRONMANImproving Reliability of New Machines at NightIRTC1interconnect reliability test chip1ISinformation systems。 ion chromatographyICAPinductively coupled argonplasma spectrometryICMSintegrated circuit measurement systemICPinductively coupled plasmaICPAESinductively coupled plasma atomic emission spectroscopyICPMSinductively coupled plasma mass spectrometryICTideal cycle timeIDDQdirect drain quiescent currentIDEALinitiatingIDLinterface definition languageIDLHimmediately dangerous to life or healthIDSinteractive diagnostic systemIEAion energy analysisIECinfused emitter couplingIEDFion energy distribution functionIERNinternalexternal recurrent neural networkIFinterfaceIGFETinsulatedgate fieldeffect transistorILBinner lead bondILDinterlevel dielectric。 highpurity metalHPVhighpressure ventHRAhuman reliability analysisHRRhigh ramp rateHRTEMhighresolution transmission electron microscopyHSQhydrogen silsesquioxaneHTOhightemperature oxidationHTRBhightemperature reverse biasHUPWhot ultrapure waterHVACheatingIiodineI/Oinput/outputI2Lintegrated injector logicI300IInternational 300 mm InitiativeICintegrated circuit。 graphical design softwareGegermaniumGEMGeneric EquipmentModelGEMVSGEM verification systemGESgeneric equipment simulatorGFCgas filter correlationGFCIground fault circuit interrupterGIDLgateinduced drain leakageGILDgas immersion laser dopingGLCgas liquid chromatographyGOIgate oxide integrityGPIBgeneralpurpose interface busGSCEgas source control equipmentGTSGEM Test SystemHhydrogenHAPhazardous air pollutantHARIhigh aspect ratio inspectionHASThighly accelerated stress testingHAZCOMHazard Communication StandardHBhorizontal Bridgeman crystalHCIhot carrier injectionHCMhollow cathode magnetronHCMOShighdensity CMOSHCShotcarrier suppressedHDhigh densityHDLhardware description languageHDPhighdensity plasmaHDPEhighdensity polyethyleneHeheliumHEMhighefficiency matchingHEPAhighefficiency particulate airHfhafniumHFhydrofluoric acidHgmercuryHIBSheavy ion backscattering spectrometryHiPOxhighpressure oxygenHLFhorizontal laminar flowHMDShexamethyldisilizaneHMIShazardous materials inventory statementHMMPhazardous materials management planHMOShighperformance MOS。 Fourier transformFTAfault tree analysisFTABFocus Technical Advisory BoardFTIRFourier transform infraredFWfull waveFWHMfullwidth halfmaximumFZfloat zoneGagalliumGACgranular activated carbonGCgas chromatography。 factory integrationFIBfocused ion beamFIDflame ionization detectorFIFOfirstinFIMSfrontopening interface mechanical standardFLfuzzy logicFLOPCfloating point operations needed per cycleFLOTOXfloating gate tunnel oxideFLRTfactory layout/relayout toolFMforeign materialFMEAfailure mode and effects analysisFMMCfactory material movement ponentFMVPFramework Member Validation ProjectFNNfeedforward neural networkFOCSfiberoptic chemical sensorFOSBfront opening shipping boxFOUPfront opening unified podFOVfield of viewFOXfield oxideFPflash pointFPDfocal plane deviation。 electropolishEPLelectron projection lithographyEPRelectron paramagnetic resonanceEPROMelectrically programmable readonly memoryEPSSelectronic performance support systemEPTequipment performance trackingEQUIPC/I equipment control and integrationEQUIPRTC equipment realtime controlERAMequipment reliabilityERMenterprise reference modelERNexternal recurrent neural networkERPextended range pyrometerERSevent reporting standardERTemergency response timeESengineering specification。 electromagnetic patabilityEMFelectromagnetic fieldEMGelectromigrationEMIelectromagnetic interferenceEMMAelectron microscopy and microanalysisEMPelectromagnetic pulseEMRenter move requestEMUelectromagnetic unitEOSelectrical overstressEOTend of transfer。 electromagnetic。 engineering puteraided designECAEelectronic puteraided engineeringECLemitter coupled logicECNengineering change noticeECOengineering change orderECQBelectrochemical qua