【文章內(nèi)容簡介】 A 31 6Sigma Training Total Process Control System 2. Process Control Plan ? A summary description of the procedures for controlling all significant characteristics of the processes used to manufacture a family of similar products. It identifies the important processes used to produce a product, the significant characteristics associated with each process and how to control each of those significant characteristics. ? Control Plan consists : a) Process b) Equipment c) Significant characteristics d) Measurement method e) Minimum sample size and frequency f) Analysis method g) Out of control action 32 6Sigma Training Control Plan P r e p a r a t i o n I ns p e c t i o n P r o c e s sS a m p l e F r e q ue nc y 1 w a f e r 1 w a f e r / l o tI d i e I d i e / w a f e r / l o tc r o s s l i n e 5 w f r s / l o tt h r u c e n t e r A f t e r s p u t t e r i n g q u a l i t y5 d i e / w f r1 W a f e r / 5 W a f e r1 W a f e r / 5 W a f e r5 d i e / w f r1 W a f e r / 5 W a f e r1 W a f e r / 5 W a f e r5 d i e / w f r 1 W a f e r / 1 W a f e rT i m e r a l a r m t i t r a t i o nc r o s s l i n et h r u c e n t e r5 d i e / w f rc r o s s l i n e 1 W a f e r / 1 W a f e rR u n c a r d 6 d ( 1 )R u n c a r d 6 h ( 1 )R u n c a r d 6 I ( 1 )R u n c a r d ( s p u t t e r P Q C P r o c e s s )M e t ho d1 W a f e r / 1 W a f e rR u n c a r d 5 e ( 1 )R u n c a r d 5 d ( 2 )R u n c a r d 3 e ( 2 )R u n c a r d 3 e ( 3 )R e c o r dB a r e e y e m i c r o s c o p e M a c h i n e i n d i c a t o r s t e pP r o d u c t i o nP r o d u c t i o nA m p m e t e r , A AR u n c a r d 3 e ( 4 )R u n c a r d 3 e ( 1 ) s t e p s t e pM a c h i n e i n d i c a t o rS p u t t e rS p u t t e r i n gP l a t i n gP l a t i n gA f t e r p l a t i n g q u a l i t yL i t h o g r a p h yL i t h o g r a p h yA f t e r l i t h o g r a p h y q u a l i t yP r o d u c t i o nO f f l i n e W e e k l yR u n c a r d 2 e ( 1 )A u t h i c k n e s s 1 5 0 0 + 1 5 0 A3 0 0 0 + 2 0 0 AO p e r a t i o n a l p r o c e d u r e I n s p e c t i o n s t a n d a r dE t c h i n gP h o t o r e s i s t R e m a i nT i W e t c h i n g i n c o m p l e t eA u e t c h i n g i n c o m p l e t e s t e pP r o d u c t i o nO p e r a t i o n a l p r o c e d u r e I n s p e c t i o n s t a n d a r d1 W a f e r / 5 W a f e rQC1 W a f e r / 1 W a f e rO q c p r o c e d u r e I n s p e c t i o n s t a n d a r d P r o c e s sP a r a m e t e rM i c r o s c o p eF m 7M b s 2 0 0O Q C T a b l e 2M i c r o s c o p eO Q C T a b l e 1O u t g o i n gH e i g h tF l o wI n c o m i n gC r i t e r i aW a f e rC o nt r o l i t e md e f e c t d i e 1 0S t a nd a r dI Q C p r o c e d u r e ( O I 0 0 )I n c o m i n g i n s p e c t p r o c e d u r eR e s p o ns i b i l i t yP r o d u c t i o nC o nt r o l m e t ho dI n c o m i n g i n s p e c t s t a n d a r dP ur p o s eQ u a n t i t y N o d i s c r e p a n c yL o t n o .N o . o f w f r . 5 d i e s 5 d i e s2 2 + 2 u m1 8 . 5 + 2 u m 2 u mD e f e c t 5 d i e s3 0 ~ 8 0 H v = 1 0 u g / u m 2D e f e c t 5 d i e s 5 d i e s1 8 + 3 u mD e v i c e n a m e P o w e r , T e m p , P r o c e s s t i m eP a s s i v a t i o n c r a c k v o i da l i g n m e n t a c c u r a c yT i W t h i c k n e s s 5 d i e sP a r t i c l e c o n t a m i n a t i o nb u m p s i z e 1 ~ + 4 u mO p e r a t i o n a l p r o c e d u r e I n s p e c t i o n s t a n d a r dQ u a l i t yA f t e r e t c h i n g q u a l i t yr p m , e x p o . E , d e v . t i m eH a r d n e s sS h e a r f o r c eV i s u a l i n s p e c t i o nI n s p e c t i o n s t a n d a r dQ u a l i t y F o r e i g n P a r t i c l eP l a t i n g t h i c k n e s sR u n c a r d 1I n s p e c t i o n b y b a r e e y e sM i c r o s c o p eO p e r a t i o n a l p r o c e d u r e E t c h i n g t i m e , e t c h a n t c o n c .V i s u a l i n s p e c t i o nR e s i s t t h i c k n e s sC D , A u c o n c .M i c r o s c o p eR e s i s t R e s i d u eW i n d o w s i z eNGOKNGNGA b n o r m a ll o tNGE n g i n e e r c o n t r o l33 6Sigma Training Total Process Control System 3. Total Control Methodology ? A set of documents providing all necessary instructions on how to control each significant variable in a process. A Total Control Methodology is used at the individual process level, while a Control Plan is used for a product line that contains several processes. ? Total Control Methodology consists : a) Positrol Plan b) Positrol Log check list c) Control Charts d) OutofControl Action Plan (OCAP) e) Process / Machine Setup Check List f) P/M Schedule and Checklist g) P/M procedures 34 6Sigma Training Attribute Control C H A R T T Y P