【正文】 film electrode, then on borondoped diamond thin film growth characteristics of indepth research and careful analysis. Then borondoped diamond electrode preparation we get, using SEM, Raman spectroscopy, XRD and other means to characterize the microstructure of borondoped diamond of its structure, and studied the Hall effect analysis BDD electrode sheet resistance BDD Electrodes, BDD electrode impedance analysis, dynamic analysis BDD electrodes and electrode potential window analyzed by cyclic voltammetry. Experiments show: the experiment is made of good quality borondoped diamond film electrodes. And then found its specific capacity is relatively large, it 2 can be used for its excellent electrochemical properties of the electrode material testing. Key Words: Borondoped diamond HFCVD Electrochemical Hall effect 3 目 錄 第一章 緒論 .....................................................................................................................................1 金剛石的晶體結構 .............................................................................................................................................. 1 金剛石的性質及應用 ......................................................................................................................................... 2 摻硼金剛石的應用 .............................................................................................................................................. 2 BDD 電極的性質及應用 ..................................................................................................................................... 3 本文的工作內容 ................................................................................................................................................... 5 第二章 實驗部分 .........................................................................................................................7 設備介紹 .................................................................................................................................................................. 7 氣路系統(tǒng) ....................................................................................................................................................... 7 真空系統(tǒng) ....................................................................................................................................................... 7 水循環(huán)系統(tǒng) .................................................................................................................................................. 8 電源系統(tǒng) ....................................................................................................................................................... 8 偏壓電源系統(tǒng) ............................................................................................................................................. 8 BDD 電極的制備工藝 .......................................................................................................................................... 9 BDD 電極的電化學分析方法 .........................................................................................................................11 第三章 摻硼金剛石 膜的生長特性研究 ............................................................................. 13 BDD 的生長速率的影響 ...................................................................................................................................13 BDD 電極掃描電子顯微鏡（ SEM）分析 ..................................................................................................13 BDD 電極的 RAMAN 光譜分析 ...........................................................................................................................14 BDD 電極 X 射線衍射 (XRD)分析 .................................................................................................................15 第四章 摻硼金剛石膜的電化學特性研究 ........................................................................ 17 BDD 電極的 HALL 效應分析 ...........................................................................................................................17 BDD 電極的充放電性能分析 .........................................................................................................................17 BDD 電極的阻抗分析 ........................................................................................................................................18 交流阻抗法 ...................................................................................................................................................18 阻抗分析 ........................................................................................................................................................18 BDD 電極的動力學分析 ...................................................................................................................................19 BDD 電極的電勢窗口分析 ............................................................................................................................20 循環(huán)伏安法 ...................................................................................................................................................20 電勢窗口分析 ..............................................................................................................................................20 4 第五章 總 結 ......................................................................................................................... 23 參考文獻 .......................................................................................................................................... 24 致 謝 .......................................................................................................................................... 26 天津理工大學 2020屆 本科 畢業(yè)論文 1 第一章 緒論 金剛石的晶體結構 金剛石 被稱為鉆石， 是 一種 無色 晶體 ，它是由碳元素組成 ，為目前已知最硬物質。 通過 實驗表明 :這次 實驗制成了 質量較好的 摻硼金剛石膜電極