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Metal Group Thin Film Section Manufacturing Engineering Dept. Page 17 CVD設(shè)備的構(gòu)成總結(jié) 主要由以下組成: ? 搬送系 (ATM Robot, Cassette Port, Cassette Loadlock, Transfer Robot, Orienter Chamber, etc) ? 氣體系 (Gas Box, Gas Distribution Unit, Gas Manifold, etc) ? 能量系 (Heater, Lamp, Radio Frequency, Micro Wave, etc) ? 真空系 (Auto Pressure Controller, Pump Unit, Exhaust Change Unit, etc) ? 控制系 (SPC, Monitor, Controller Board, Hard disk, etc) ? 輔助系 (Power Distribution, UPS Unit, Liquid Refill Unit, Cooling Water Unit, Heater Exchange, Scrubber, etc) Metal Group Thin Film Section Manufacturing Engineering Dept. Page 18 問題 ? 請(qǐng)簡述 CVD的基本概念 ? 請(qǐng)列舉 CVD設(shè)備的主要分類及其特征 ? 請(qǐng)簡述 CVD設(shè)備的主要構(gòu)成 ? 作為 CVD設(shè)備工程師,您認(rèn)為應(yīng)具備哪些方面的知識(shí) 。 From Top View Metal Group Thin Film Section Manufacturing Engineeri