【文章內(nèi)容簡(jiǎn)介】
am, designed for use in the HP9826 puter. The retman program performs some main functions. The retman program which contain alignment mark locations, focus, and exposure information, is used by the main Stepper program to accurately the reticle image onto the wafer. 添加主要參數(shù) 初始化信息 顯示所設(shè)計(jì)的圖形 PARAMETERS INITIALIZE MODIFY RETMAN PROGRAM Main functions Optimizing die layout Output wafer layout data Optimizing wafer layout RETMAN PROGRAM RETMAN PROGRAM ULTRATECHSTEPPER RETICLE MANAGER READ FROM DISK SAVE TO DISK Wafer parameters Initialize wafer Modify wafer Cont dice/steps Reticle parameters Initialize reticle Modify field List dwm 3696 RETMAN 主操作界面 RETMAN PROGRAM WIDTH STREET OUTSIDE FIELD ARRAY OFFSET X— KEY TO REFERENCE YOFFET Y 0 Key ROTAT/CHECK PE INTERMIX WAFER RADIUS ROWS ?AMS N N 1 LENS RETICLE AUTOSTACK? TITLE HEIGHT COLUMN W 3 N