【文章內(nèi)容簡(jiǎn)介】 eldEMGelectromigrationEMIelectromagnetic interferenceEMMAelectron microscopy and microanalysisEMPelectromagnetic pulseEMRenter move requestEMUelectromagnetic unitEOSelectrical overstressEOTend of transfer。 equivalent oxide thicknessEPextreme pressure。 electropolishEPLelectron projection lithographyEPRelectron paramagnetic resonanceEPROMelectrically programmable readonly memoryEPSSelectronic performance support systemEPTequipment performance trackingEQUIPC/I equipment control and integrationEQUIPRTC equipment realtime controlERAMequipment reliabilityERMenterprise reference modelERNexternal recurrent neural networkERPextended range pyrometerERSevent reporting standardERTemergency response timeESengineering specification。 expert systemESCelectrostatic chuckESCAelectron spectroscopy for chemical analysisESDelectrostatic dischargeESHenvironmentESMelectronic service manualETABExecutive Technical Advisory BoardETQRExternal Total Quality and ReliabilityEUVextreme ultravioleteVelectron voltEWMAexponentially weighted moving averageFfluorineF/Ifinal inspectionFAfailure analysisFABfast atom bombardmentFAMOSfloatinggate avalancheinjection metaloxide semiconductorFBGAfinepitch ball grid arrayFCflip chipFCMfacilities cost modelFCSfactory control systemFDCfault detection and classificationFDEfrequency domain experimentsFDSOIfully depleted silicon on insulatorFeironFECfabrication evaluation chipFEMfinite element modelFEOLfront end of lineFESEMfield emission scanning electron microscopyFETfieldeffect transistorFFTfast Fourier transformFFUfilter fan unitFIfilterability index。 factory integrationFIBfocused ion beamFIDflame ionization detectorFIFOfirstinFIMSfrontopening interface mechanical standardFLfuzzy logicFLOPCfloating point operations needed per cycleFLOTOXfloating gate tunnel oxideFLRTfactory layout/relayout toolFMforeign materialFMEAfailure mode and effects analysisFMMCfactory material movement ponentFMVPFramework Member Validation ProjectFNNfeedforward neural networkFOCSfiberoptic chemical sensorFOSBfront opening shipping boxFOUPfront opening unified podFOVfield of viewFOXfield oxideFPflash pointFPDfocal plane deviation。 flat panel displayFPGAfieldprogrammable gate arrayFPLAfieldprogrammable logic arrayFPLFfieldprogrammable logic familyFPLSfieldprogrammable logic switchFPMSFactory Performance Modeling SoftwareFPROMfieldprogrammable readonly memoryFRACASFailure ReportingFRAMEFailure Rate Analysis and ModelingFRMBfast ramp mini batchFSGfused silica glassFSMfinite state machineFTfinal test。 Fourier transformFTAfault tree analysisFTABFocus Technical Advisory BoardFTIRFourier transform infraredFWfull waveFWHMfullwidth halfmaximumFZfloat zoneGagalliumGACgranular activated carbonGCgas chromatography。 gravimetric calibratorGCCgeneric cell controllerGCDgas chromatography distillationGCMSgas chromatography mass spectroscopyGDPPgas drive plasma pinchGDSgraphical design system。 graphical design softwareGegermaniumGEMGeneric EquipmentModelGEMVSGEM verification systemGESgeneric equipment simulatorGFCgas filter correlationGFCIground fault circuit interrupterGIDLgateinduced drain leakageGILDgas immersion laser dopingGLCgas liquid chromatographyGOIgate oxide integrityGPIBgeneralpurpose interface busGSCEgas source control equipmentGTSGEM Test SystemHhydrogenHAPhazardous air pollutantHARIhigh aspect ratio inspectionHASThighly accelerated stress testingHAZCOMHazard Communication StandardHBhorizontal Bridgeman crystalHCIhot carrier injectionHCMhollow cathode magnetronHCMOShighdensity CMOSHCShotcarrier suppressedHDhigh densityHDLhardware description languageHDPhighdensity plasmaHDPEhighdensity polyethyleneHeheliumHEMhighefficiency matchingHEPAhighefficiency particulate airHfhafniumHFhydrofluoric acidHgmercuryHIBSheavy ion backscattering spectrometryHiPOxhighpressure oxygenHLFhorizontal laminar flowHMDShexamethyldisilizaneHMIShazardous materials inventory statementHMMPhazardous materials management planHMOShighperformance MOS。 highdensity MOSHOMERhazardous organic mass emission rateHOPGhighly oriented pyrolitic graphiteHPhigh purityHPEMHybrid Plasma Equipment ModelHPIhigh pressure isolationHPLhighperformance logicHPLChighperformance liquid chromatographyHPMhazardous production materials。 highpurity metalHPVhighpressure ventHRAhuman reliability analysisHRRhigh ramp rateHRTEMhighresolution transmission electron microscopyHSQhydrogen silsesquioxaneHTOhightemperature oxidationHTRBhightemperature reverse biasHUPWhot ultrapure waterHVACheatingIiodineI/Oinput/outputI2Lintegrated injector logicI300IInternational 300 mm InitiativeICintegrated circuit。 Investment Council。 ion chromatographyICAPinductively coupled argonplasma spectrometryICMSintegrated circuit measurement systemICPinductively coupled plasmaICPAESinductively coupled plasma atomic emission spectroscopyICPMSinductively coupled plasma mass spectrometryICTideal cycle timeIDDQdirect drain quiescent currentIDEALinitiatingIDLinterface definition languageIDLHimmediately dangerous to life or healthIDSinteractive diagnostic systemIEAion energy analysisIECinfused emitter couplingIEDFion energy distribution functionIERNinternalexternal recurrent neural networkIFinterfaceIGFETinsulatedgate fieldeffect transistorILBinner lead bond