keithley講座ppt課件(編輯修改稿)
2025-03-20 12:32 本頁面
【文章內(nèi)容簡介】 169。 Copyright 2022 Keithley Instruments, Inc. 11 Wafer Level Reliability Option ? Reliability option – WLR libraries ? Device Reliability – HCI – NBTI – Fast measure NBTI (require 2600 SMU) – NBTI OnTheFly – NBTI Pulse OnTheFly (requires 4200PIV) ? GOI – TDDB – VRamp – JRamp ? EM – Constant I EM – IsoThermal EM – MySQL Database – ACSPDA (Parametric Data Analysis) ? Lifetime Analysis for HCI and TDDB ? Weibull distribution analysis A G R E A T E R M E A S U R E O F C O N F I D E N C E a 169。 Copyright 2022 Keithley Instruments, Inc. 12 Fast NBTI (2600) ? Perform single point NBTI test in less than 300us A G R E A T E R M E A S U R E O F C O N F I D E N C E a 169。 Copyright 2022 Keithley Instruments, Inc. 13 NBTI on_the_fly method (2600) ? Denais On_the_fly method ? Change gate voltage in small voltage step ? Source code provided ? Can be performed with parallel groups A G R E A T E R M E A S U R E O F C O N F I D E N C E a 169。 Copyright 2022 Keithley Instruments, Inc. 14 Hot Carrier Injection (2600) A G R E A T E R M E A S U R E O F C O N F I D E N C E a 169。 Copyright 2022 Keithley Instruments, Inc. 15 TDDB (2600) ? Support up to 4 SMUs and 4 devices in one group ? Compliance with JEDEC standard 92A ? Including soft and hard breakdown detection A G R E A T E R M E A S U R E O F C O N F I D E N C E a 169。 Copyright 2022 Keithley Instruments, Inc. 16 Common test libraries examples – MOSFET ? BVDSS (Drain Source voltage break down, gate source shorted) ? BVDSV (Drain Source voltage break down, gate biased) ? BVGDO (Gate Drain voltage break down, source opened) ? BVGDS (Gate Drain voltage break down, source drain shorted) ? BVGSO (Gate source voltage break down, drain opened) ? IDL (Drain leakage current, gate source shorted) ? IDS (single point Drain current) ? IDVD (IDVD curve) ? IDVG (IDVG curve) ? IDVG@V
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