電子顯微術ppt課件-wenkub
2023-05-27 03:17:38 本頁面
【正文】 Wehnelt Anode Electron Beam V0 Electron Beam V0 1st Anode 2nd Anode Flashing Voltage V1 V0:Accelerating voltage V1: Extraction voltage Bias Voltage Control Thermionic Emission Cold Field Emission (～ ) Filament Current Control Filament Comparison of electron guns InLens Type (S5200) Primary Beam Lens SE Detector Specimen Theory of Scanning Electron Microscope Out Lens Type (WSEM, S4300) Primary Beam Lens Specimen SE Detector Snorkel Type (S4700 amp。置于末級透鏡上部的掃描線圈能使電子束在試樣表面上做光柵狀掃描。第六章 掃描電子顯微書 Lettuce Field(16M DRAM) Theory of Scanning Electron Microscope Hitachi HighTechnologies Corporation Nano Technologies Sales Dept. 1. Resolution Improvement 30kV 1kV nm nm nm nm nm nm S5200 S5000H S5000 Development of a new UHR Obj. Lens New S4800 FESEM Resolution: 15kV 1kV Configuration of a scanning electron microscope Objective Movable Aperture Model S3000N Specimen Stage CRT Electron Gun SE Detector Specimen Chamber Comparison among OM, TEM and SEM O M T E M S E MV o l t a g e ―Hi g h V o l t a g e2 5 ~ 3 0 0 k VHi g h V o l t a g e0 . 5 ~ 3 0 k VIl l um i na t i o nSo ur c eL i g ht E l e c t r o n E l e c t r o nObse r v a t i o n In A i r In V a c uu m In V a c uu mL e ns Gl a ss P o l e P i e c e P o l e P i e c eR e so l ut i o n 5 ~ 0 . 1 μ m 0 . 5 ~ 0 . 1 nm 7 ~ 0 . 6 nmF o c us D e pt h( X 5 0 0 )Sh a l l o w ( 2 ~ 3 μ m ) D e e p ( 5 0 0 μ m) D e e p ( 0 . 1 ~ 1 m m )x r a y s A na l y si s N o t po ssi bl e P o ssi bl e P o ssi bl e C o l o r C o l o r B l a c k a nd W hi t e B l a c k a nd W hi t eMa g ni f i c a t i o n ~ 1K ~ 1000K ~ 800KF i e l d o f V i e w L a r g e Sm a l l L a r g eSp e c i m e nP r e pa r a t i o nE a sy C o m pl i c a t e d E a sySp e c i m e n Si z e L a r g e Sm a l l L a r g eMe t a l c o a t i ng N o t ne c e ssa r y N o t ne c e ssa r y N e c e ssa r yIm a g eT r a nsm i t t e d Im a g eo r Su r f a c e Im a g eT r a nsm i t t e d I
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