材料科學中電子顯微鏡的各種技術介紹(已修改)
2025-01-08 21:30 本頁面
【正文】 Part III Analytical Electron Microscopy in Materials Science mode in AEM in AEM Xray Energy Dispersive Spectroscopy (EDS) Electron Energy Loss Spectroscopy (EELS) Microdiffraction Convergent beam diffraction Introduction generated in the interaction between the incident high energy electron beam and the thin crystalline specimen to form a probe between TEM, SEM and AEM TEM Image mode Diffraction mode SEM Image mode: SE, BSE, XRay Mapping Microanalysis: WDS, EDS AEM Imaging mode: TEM, STEM, SEM, Mapping (XRay + EELS) Diffraction mode: Scanning probe ? Stationary diffraction pattern Microanalysis: EDS, EELS, microdiffraction, convergent beam diffraction How to form a probe ? Detectors needed for an AEM between TEM, SEM and AEM TEM Image mode Diffraction mode SEM Image mode: SE, BSE, XRay Mapping Microanalysis: WDS, EDS AEM Imaging mode: TEM, STEM, SEM, Mapping (XRay + EELS) Diffraction mode: Scanning probe ? Stationary diffraction pattern Microanalysis: EDS, EELS, microdiffraction, convergent beam diffraction SEM Image mode: SE, BSE, XRay Mapping Microanalysis: WDS, EDS AEM Imaging mode: TEM, STEM, SEM, Mapping (XRay + EELS) Diffraction mode: S
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