vacuum機臺專用名詞(參考版)
2025-05-14 19:46本頁面
【正文】 Cryo Pump Cryo Pump Gas Flow Gas He. Low Temp He. High Temp Cooling Water First Condensation Second Condensation Gas Water in Water out Compressor Oil filter Absorber Regeneration of the Cryo pump Start up rege. Close main valve Shut off cryopump Band heater on Introduce dry N2 Atm pressure Purge dry N2 Complete warm up Stop dry N2 yes yes no no Rough pump the cryopump Complete rough pump Band heater off no yes Start up cryopump Complete cool down Complete rege. no yes Exhaust system units 。 10~200K 氮氣、氧氣、氬氣。 Function of Vacuum System ? Exhaust ? Rough Vacuum 10 torr ? High Vacuum 10 torr ? Vent ? Slow Vent (N2) ? Normal Vent (CDA) ? Process Gas In(Ar,O2,N2,H20) ? Flush(通入 N2,再抽出帶走 particle) 7 3 Pump Units ? Dry Pump (2 units): Roughing Pumps ? System pump:iF1800 ? Load/Lock pump:diF600KDD ? Cryo Pump (6 units): High Vacuum Pumps ? CP1,2(U8HSP,C30V):L/ch ? CP01,02(U12HSPL,C30MV):T0/ch ? CP3,4(U16HSPL,C31MV):S/ch Vacuum Gauge ? PIG (Pirani Indication Gauge) ? IG (Iron Gauge) ? DG (Balatron Vacuum Gauge) ? Color Indications ATM PIG High PIG Low IG High IG Low 真空計之作用 ? 有離子真空計和 Pirani真空計 ? 離子真空計利用系統(tǒng)中之氣體分子踫撞並且將游離，正離子被集極收集，其所造成之電流大小與分子數(shù)目多少，既系統(tǒng)壓力成比例關係，由電流之量測以作壓力之指示。 ? 抽氣速率大小 邦浦的抽氣速率隨壓力而改變，並非定值。 HF：氫氟酸 HEPA：高效過濾器 Hot：急件 Halogen lamp 鹵素燈
畢業(yè)設計相關推薦
鄂ICP備17016276號-1