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【正文】 the wafers are cut differently. 6) Why do we choose silicon as a MEMS structural material? Semiconductors are a class of materials which have the unique property that their electrical conductivity can be controlled over a very wide range by the introduction of dopants. While this property can easily be observed in crystalline, polycrystalline, or amorphous semiconductor materials, crystalline materials provide the most reproducible properties and the highest performance devices and are almost always used in integrated circuits. Dopants are atoms that generally contain either one more or one fewer electrons in their outermost shell than the host semiconductor. They provide one extra electron or one missing electron (a hole) pared to the host atoms. These excess electrons and holes are the carriers, which carry current in semiconductor devices. The key to building semiconductor devices and integrated circuits lies in the ability to control the local doping and hence the local electronic properties of a semiconductor crystal. 7) Semiconductor Devices Understanding of how the basic devices used ICs operate is useful, because it provides some understanding of the objectives we have for IC technology. The most monly used IC devices are: 1) PN Diodes 2) Bipolar Junction Transistors 3) MOS Transistors 2. Introduction to the Lithography Process 1) Positive and Negative Resist KOH、 Acetone、 TMAH HF ? Basic step of lithograph
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