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【正文】 d restart ACS Now ACS can control 2600 for testing A G R E A T E R M E A S U R E O F C O N F I D E N C E a 169。 execution at the device, site, wafer, and cassette level ? Full GUI operation including interactive test mode ? Wafer map and description utility ? Semi and fully automatic prober support A G R E A T E R M E A S U R E O F C O N F I D E N C E a 169。 Copyright 2022 Keithley Instruments, Inc. 4 Probers supported ? Alessi ? Cascade – Alessi 6100 – Summit 12022 series – S300 ? Micromanipulator – 8860 or any patible semiautomatic probers ? Suss – PA 200/300 ? Tokyo Semitsu (TSK) – TSK APM60/80/90 – TSK UF 200/3000 ? TEL – TEL P8/P12 – TEL 19S ? EG – 2022/2022 – 4080/4090 – 6000 A G R E A T E R M E A S U R E O F C O N F I D E N C E a 169。 Copyright 2022 Keithley Instruments, Inc. 2 Hardware configuration (2) SMU per pin for high speed production and WLR ? High speed parallel test ? High accuracy measurements A G R E A T E R M E A S U R E O F C O N F I D E N C E a 169。A G R E A T E R M E A S U R E O F C O N F I D E N C E a 169。 Copyright 2022 Keithley Instruments, Inc. 1 Hardware configuration (1) Device Characterization/Parametric test ? DC IV – 4200SCS – Series 2600 SMU – Series 2400 SMU – Series 230 SMU ? Switch Matrix – 707A/708A switch mainframe – 7072A/7174A matrix cards ? C meter – 420084 (4284A) – 420080 (4980A) – 4294A ? Pulse Generator – 81110A – 3401/3402 – 4200PG2 ? Special PIV package – 4200PIV A G R E A T E R M E A S U R E O F C O N F I D E N C E a 169。 Copyright 2022 Keithley Instruments, Inc. 3 Utilizing TSP engine on Series 2600 SMU for parallel test A G R E A T E R M E A S U R E O F C O N F I D E N C E a 169。 Copyright 2022 Keithley Instruments, Inc. 5 Automated Characterization Suite (ACS) I
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