氣體輸送系統(tǒng)安全培訓教材-資料下載頁
2025-02-21 12:19本頁面
【正文】 llation is determined by the process flow requirements.lThere are two types of excess flow devices:1. Excess flow valve2. Excess flow switch88Excess Flow Devices89FiltersPurposes:l 去除氣流中的顆粒l 過濾器的重要性l 過濾效率90Gas Filter Selection Criteria 過濾器選型準則lFlow rate 氣體流量lGas Compatibility 與氣體的兼容性–Corrosives 腐蝕性–Reactants 反應物lOutgassing performance 透氣性能91Gas Filter Selection Criteria 過濾器選型準則 lTemperature 氣體溫度lPressure 氣體壓力lParticle Retention Rating 顆粒截獲率92Filter Materialsl Evaluation of a filter should include all ponents of the filter.l The elastomeric or teflon filter is the most economical and mon filter. 特氟龍是最常用且經濟的過濾材質l Filter ponents * Housing 濾殼* Media 過濾芯* Media to housing seal 濾殼的密封* Support structure (elastomeric)濾芯的固定架93Filter MaterialslFilter media 過濾材質* Elastomeric 塑料材質* Ceramic 陶瓷* Metallic 金屬 316 LSS Hastelloy C22 Nickel94PurifiersThere are two types of purifiers: 1. getter (metal) regenerable2. chemical resin95PurifiersApplicationslEasy maintenance/changelSafetylLife tracking by cylinder changeslIncrease panel piping life (corrosion, contamination)lPurge gas purifier improves cylinder purge96PurifiersApplicationslOther applications– Epi/CVD– Sputtering (metal applications)– There maybe multiple purifiers located in the Argon delivery lines. The metal process must be particle free. – If particles are present they could cause shorts or opens in the metal lines.– Corrosive/reactive gas97 Gas Properties Challenging Flow ControllAmmonia (NH3) Liquefied pressed gaslBoron Trichloride (BCl3)Liquefied pressed gas 98 Gas Properties Challenging Flow ControllChlorine (Cl2)Liquefied pressed gas lDiborane (B2H6)Compressed gas 99lDichlorosilane (SiH2Cl2)Liquefied pressed gas lDisilane (Si2H4)Compressed gas Gas Properties Challenging Flow Control100Gas Properties Challenging Flow ControllHydrogen Bromide (HBr) Liquefied pressed gaslHydrogen Chloride (HCl) Liquefied pressed gas 101lHydrogen Fluoride (HF) Liquefied pressed gaslNitrous Oxide (N2O) Liquefied pressed gaslSilane (SiH4) Compressed gaslTungsten Hexafluoride (WF6) Gas Properties Challenging Flow Control102Testing Analysis 測試及分析高純氣體管道需如下測試（尤其適用高危險性特氣系統(tǒng)）：Press test壓力測試 =1%drop design bar * 24hrHelium leak test氦檢漏測試 (一個大氣壓下每秒泄漏 ??CC)，測試儀器Alcatel or Info針對６ “Fab的特氣系統(tǒng)通常 Particle Increase Counter顆粒度測試 ?pcs/scf ?μm (每立方英尺大于 ?的顆粒數(shù)不大于 ?個 )，測試儀器 PMSuLPC101HP針對 6”Fab的特氣系統(tǒng)通常 =10pcs/scf, Moisture Increase Analysis水分增量分析 ppb(十億分之一 )，測試儀器Meeco/Ametek針對６ “Fab的特氣系統(tǒng)通常 50ppbOxygen Increase Analysis氧分增量分析 ppb(十億分之一 )，測試儀器 DeltaF針對６ “Fab的特氣系統(tǒng)通常 50ppb
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