氣體輸送系統(tǒng)安全培訓教材-文庫吧在線文庫
【正文】 sign bar * 24hrHelium leak test氦檢漏測試 (一個大氣壓下每秒泄漏 ??CC)，測試儀器Alcatel or Info針對６ “Fab的特氣系統(tǒng)通常 Particle Increase Counter顆粒度測試 ?pcs/scf ?μm (每立方英尺大于 ?的顆粒數(shù)不大于 ?個 )，測試儀器 PMSuLPC101HP針對 6”Fab的特氣系統(tǒng)通常 =10pcs/scf, Moisture Increase Analysis水分增量分析 ppb(十億分之一 )，測試儀器Meeco/Ametek針對６ “Fab的特氣系統(tǒng)通常 50ppbOxygen Increase Analysis氧分增量分析 ppb(十億分之一 )，測試儀器 DeltaF針對６ “Fab的特氣系統(tǒng)通常 50ppb。67Valve Manifold Box (VMB) 閥組箱68 Valve Manifold Box (VMB) 閥組箱69Gas Jungle 混氣盒70Gas System Components1. Piping / tube2. Valves3. Regulators4. Pressure indicators5. Excess flow devices6. Filters7. Purifiers8. Mass flow controllers71Piping / TubelPolymer nylon, plastics, etc.lMetals– Copper, 304 SS, 316 LSS, 316 LSS VAR, Hastelloy72Piping / Tubel Metal Treatments2 types:1. Polish拋光 : Chempolish (acid) CP化學拋光Electropolish EP電解拋光2. Passivation鈍化 : Oxygen PassivationFluorine Passivationl Mechanical Fittings– Compression 雙卡套接頭– Threaded 螺紋接頭– Vacuum 真空接頭– Face seal 面密封接頭 VCR73VCR Mechanical Fitting74 Moisture Permeation Through Plastic Tubing 塑料材料很少使用在半導體行業(yè)的氣體輸送系統(tǒng)上，因其 有透濕性。 The layout of a gas distribution system is determined by the customer’s needs and cleanroom design.61Bulk Gas Distribution Systeml Ultra High Purity (process) systeml Bulk gas distribution piping systems are characterized by large pipe sizes with multiple branches and tool hookups.l All delivery lines should be labeled with the line content and flow direction. All valves must be labeled.62 Cylinder Gas Distribution Piping SystemlSmaller tubing sizes and fewer tool hookups.lValve manifold boxes (VMBs) Two design philosophies: 1. 1 cylinder / 1 tool 2. Switchover Systems or VMBs 63Materials of ConstructionTypical Materials of pipe or tube construction for the gas industry64Cylinder Gas Cabinet65 A Variety of Gas Delivery SystemslExamples:167。 aluminum, 鋁167。?Require usage patterns, peak flows and their duration, and monthly volumes for correct sizing. 根據(jù)實際使用模式、最大流量及其持續(xù)時間和月消耗量來更正蒸發(fā)器規(guī)格。 通常會燃燒的物質(zhì)在高氧環(huán)境會極易燃燒，且燃燒速度極快25氣體分類二 — 氧化性氣體l氧化性危險防護– 提供排風系統(tǒng)– 正確操作氣瓶– 使用相容的原料– 避免引燃點– 確認系統(tǒng)經(jīng)過適當?shù)那逑?6氣體分類二—毒性氣體l 例如– AsH3– PH3– B2H6l 毒性氣體之危險性對身體毒害l 中毒途徑– 吸入– 通過皮膚吸收– 吞食– 注射27氣體分類二—毒性氣體l 專業(yè)術(shù)語TWA (Time Weighted Average) – 工人每天8小時，每周40小時，無任何防護措施的情況下允許的最高接觸濃度，并且不會對人體產(chǎn)生傷害。 通常不會燃燒的物質(zhì)在高氧環(huán)境會燃燒167。(H2)45大宗深冷液態(tài)氣體lCryogenic liquid + heat = gasLiquidtogas expansion ratio from 694 (N2) to 857 (O2) 液態(tài)到氣體的膨脹率 694(N2)857(O2)46Storage Supply System47Vaporizers蒸發(fā)器 provide the heat that con
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