氣體輸送系統(tǒng)安全培訓(xùn)教材(參考版)
2025-02-23 12:19本頁(yè)面
【正文】 Nickel94PurifiersThere are two types of purifiers: 1. getter (metal) regenerable2. chemical resin95PurifiersApplicationslEasy maintenance/changelSafetylLife tracking by cylinder changeslIncrease panel piping life (corrosion, contamination)lPurge gas purifier improves cylinder purge96PurifiersApplicationslOther applications– Epi/CVD– Sputtering (metal applications)– There maybe multiple purifiers located in the Argon delivery lines. The metal process must be particle free. – If particles are present they could cause shorts or opens in the metal lines.– Corrosive/reactive gas97 Gas Properties Challenging Flow ControllAmmonia (NH3) Liquefied pressed gaslBoron Trichloride (BCl3)Liquefied pressed gas 98 Gas Properties Challenging Flow ControllChlorine (Cl2)Liquefied pressed gas lDiborane (B2H6)Compressed gas 99lDichlorosilane (SiH2Cl2)Liquefied pressed gas lDisilane (Si2H4)Compressed gas Gas Properties Challenging Flow Control100Gas Properties Challenging Flow ControllHydrogen Bromide (HBr) Liquefied pressed gaslHydrogen Chloride (HCl) Liquefied pressed gas 101lHydrogen Fluoride (HF) Liquefied pressed gaslNitrous Oxide (N2O) Liquefied pressed gaslSilane (SiH4) Compressed gaslTungsten Hexafluoride (WF6) Gas Properties Challenging Flow Control102Testing Analysis 測(cè)試及分析高純氣體管道需如下測(cè)試（尤其適用高危險(xiǎn)性特氣系統(tǒng)）：Press test壓力測(cè)試 =1%drop design bar * 24hrHelium leak test氦檢漏測(cè)試 (一個(gè)大氣壓下每秒泄漏 ??CC)，測(cè)試儀器Alcatel or Info針對(duì)６ “Fab的特氣系統(tǒng)通常 Particle Increase Counter顆粒度測(cè)試 ?pcs/scf ?μm (每立方英尺大于 ?的顆粒數(shù)不大于 ?個(gè) )，測(cè)試儀器 PMSuLPC101HP針對(duì) 6”Fab的特氣系統(tǒng)通常 =10pcs/scf, Moisture Increase Analysis水分增量分析 ppb(十億分之一 )，測(cè)試儀器Meeco/Ametek針對(duì)６ “Fab的特氣系統(tǒng)通常 50ppbOxygen Increase Analysis氧分增量分析 ppb(十億分之一 )，測(cè)試儀器 DeltaF針對(duì)６ “Fab的特氣系統(tǒng)通常 50ppb。 316 LSS Diaphragm Seal Valve 隔膜閥77Check Valves78Safety Relief Valves79Cylinder ValveslThe tied diaphragm valve is the primary valve used in specialty gases. 隔膜閥是特氣輸送系統(tǒng)中首選閥門(mén)。 Packed Seal Valve 填塞密封閥（針閥等）187。67Valve Manifold Box (VMB) 閥組箱68 Valve Manifold Box (VMB) 閥組箱69Gas Jungle 混氣盒70Gas System Components1. Piping / tube2. Valves3. Regulators4. Pressure indicators5. Excess flow devices6. Filters7. Purifiers8. Mass flow controllers71Piping / TubelPolymer nylon, plastics, etc.lMetals– Copper, 304 SS, 316 LSS, 316 LSS VAR, Hastelloy72Piping / Tubel Metal Treatments2 types:1. Polish拋光 : Chempolish (acid) CP化學(xué)拋光Electropolish EP電解拋光2. Passivation鈍化 : Oxygen PassivationFluorine Passivationl Mechanical Fittings– Compres
教學(xué)課件相關(guān)推薦
鄂ICP備17016276號(hào)-1