微機電系統(tǒng)ppt課件(2)-資料下載頁
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【正文】 s and games)； ? Microflow systems。 ? Temperature, pressure measurement, chemical and vibration sensors。 ? Distributed control of aerodynamic and hydrodynamic systems, Hydrothermo graphic vibration sensor。 ? In wireless munications area, Radio frequency devices ： High frequency circuits，RF switches， Electrical ponents such as inductors and tunable capacitors ,With the integration of such ponents, the performance of munication circuits will improve. ? Distributed sensors both for conditionbased maintenance and for structural health and monitoring。 ? Distributed unattended sensors both for asset tracking and for environmental/security surveillance。 ? Reading/writing magic heads, Atomic resolution data storage devices。 ? Miniature analytical instruments。 ? Noninvasive biomedical sensors。 ? In optical MEMS. Projection displays and opticalfiber switches are just the beginning! Diffractive optics, adaptive optics, photonic crystals, and subwavelength structures are well suited for implementation in MEMS. This will not only lower the cost, but also add functionality. Promising application areas include environmental monitoring, security, surveillance, biomedicine, optical interconnects, optical fiber ponents, and optical wireless munications. MEMS Advantages ? IC Technology used: Integrated multiple and more plex functions on a chip, to form a monolithic system (sensors +processing+ actuators), Miniaturization with no loss of functionality, Improved performance. ? Batch Fabrication: Reduced Manufacturing Cost amp。 Time. ? Microponents make the system faster, more reliable, more portable, cheaper, low power consumption, easily amp。 massively employed, easily maintained amp。 replaced. ? Easy to integrate into systems or modify. ? Little harm to environment and capable of incorporating. ? Exploitation of new physics domains. Home work: 1)What is MST? What is micromachine? What is MEMS? What is NEMS? What is microsystem? And explain them simply. 2)What are advantages of micro technology? Why are governments of different countries interested in MEMS? 3) Why do we use Silicon as MEMS materials? 4) What are the main application fields of MEMS? Explain these fields respectively (speak out at least four application fields). You may take some examples to support your ideas. 5) What is ADXL78? Find as more as possible information on websites about this mercial product.
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