【正文】
rse bias V) ? Vbr_Ird (Reverse break down voltage) ? Vfd_Ifd (Forward voltage @ forward bias I) ? Vfd_Ifd_vsweep (Forward IV sweep) ? Vrd_Ird (Reverse voltage @ reverse bias I) ? Vrd_Ird_vsweep (Reverse IV sweep) A G R E A T E R M E A S U R E O F C O N F I D E N C E a 169。 Copyright 2022 Keithley Instruments, Inc. 19 Capacitance measurement library ? Keithley 590 C meter – c_meas (single point c measurement) – ct_sweep – cv_sweep – cv_pulse_sweep ? Agilent 4284/4980 library – c_meas – cv_sweep ? Agilent 4294 library – cv_sweep – FI_sweep (frequency sweep) A G R E A T E R M E A S U R E O F C O N F I D E N C E a 169。 Copyright 2022 Keithley Instruments, Inc. 20 Charge pumping library ? 4200 + PG2 – Amplitude sweep – Base voltage sweep – Rise time sweep (linear and log) – Fall time sweep (linear and log) – Frequency sweep (linear and log) – Three level sweep (4200 + 4205 PG2 only) ? 4200 + Agilent 81110 – Amplitude sweep – Base voltage sweep A G R E A T E R M E A S U R E O F C O N F I D E N C E a 169。 Copyright 2022 Keithley Instruments, Inc. 21 Charge trapping and Pulse IV (4200 + PIV) ? Charge trapping – Single pulse charge trapping ? Pulse IV – VgsId – VdsId – Scope capture A G R E A T E R M E A S U R E O F C O N F I D E N C E a 169。 Copyright 2022 Keithley Instruments, Inc. 22 Summary ? ACS is layered on top of Keithley’s core instrumentation ? ACS = software platform + standard library + customization ? ACS integrated system is highly flexible and configurable ? Value adds are – Productivity improvement with easeofuse software – Wafer level automation for lab and production – Highly flexible with build in TSP and C development environment – Bundled device and reliability library for semiconductor lab A G R E A T E R M E A S U R E O F C O N F I D E N C E a 169。 Copyright 2022 Keithley Instruments, Inc. 23 End Thanks