03-光刻機結(jié)構(gòu)及工作原理1(編輯修改稿)
2024-11-18 23:47 本頁面
【文章內(nèi)容簡介】 寬 0.3 pm 脈沖頻率 4000 Hz 脈沖能量 5 mJ 輸出功率 20 W,光刻機結(jié)構(gòu)：曝光系統(tǒng),* 離軸照明,光刻機結(jié)構(gòu)：曝光系統(tǒng),頂部模塊 (Top Modular),光刻機結(jié)構(gòu)：曝光系統(tǒng),* 刀口狹縫Slit,光刻機結(jié)構(gòu)：曝光系統(tǒng),* 投影物鏡,典型的投影物鏡： 30 塊鏡片 60 個光學表面 0.8m 最大直徑 500kg 重量,wafer,v,v,v,v,v,v,v,,,,Objective lens,reticle,Condenser lens,Light source,,Aperture stop,光刻機工作原理：成像原理 Imaging Principle: Optical Projection,Imaging Principle: Fourier Optics,,,object,Projection Lens Entrance Pupil,NA = Numerical Aperture = Angular Measure of Lens Size,(wafer),(reticle),Image,Definition of Numerical Aperture (NA),Diffraction,,,Illumination of a Periodic Grating,n = order ,n = 0,n = /+1,n = /+3,Diffraction Orders,n = 0,n = 1,n = 3,Reticle level,Wafer level,DC bias,Resist,Zero and +1st order waveform,Zero and 3rd order waveform,Diffraction Orders,Zero order waveform,Recombination of Orders,A grating diffracts the light in orders. The orders contain information about the pattern on the grating. A lens can recombine the orders to form an image of the wafer.,,5,7,+7,+5,sum,+,First order,Third order,Recombination of Orders,Zero order,Recombination of Orders,Image,Fourier Coefficients,3 1 0 +1 +3,Zero order,Criterion to Form an Image,Only the zero order is not enough to form an i
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