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s 1 mm2 Multiquantum wells (MQW) vertical structure of epitaxial wafer Blue light es from MQW, where is also called active region. Can we make LED electrodes with vertical structure? answer depends on the substrate. vertical structure will cause high resistance. is not good for fabrication when the two electrodes are at different sides. Photoetching and ICP etching Pelectrode and nelectrode are made at the same side. ICP : Inductively Coupled Plasma Transparent electrode evaporation Since pGaN layer is in high resistance, we need to evaporate transparent electrode to improve current spreading. The electrode is as thin as about 12 nm, so it is transparent. LED chip lateral structure LED chip VS vertical structure LED chip Different pelectrode structures To improve current spreading and luminous efficiency LED chips in our lab The mechanism of LED balanced state The mechanism of LED Forward voltage is applied. The mechanism of LED Electrons and holes rebine to emit light. The development of LED packaging LED Packaging ? To get the input signa