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業(yè)等相當(dāng)特殊的生產(chǎn)型態(tài),難以計(jì)算每一產(chǎn)品,在各個(gè)機(jī)臺(tái)的實(shí)際生產(chǎn)時(shí)間; (4)產(chǎn)品良率的不確定因素、生產(chǎn)環(huán)境的異動(dòng)和設(shè)備的當(dāng)機(jī)等,使得良率控制不易; (5)雖然機(jī)臺(tái)當(dāng)機(jī)可經(jīng)由預(yù)防保養(yǎng)獲得改善,但是仍有不可抗拒的突發(fā)因素,使得機(jī)器設(shè)備發(fā)生不可預(yù)測(cè)的當(dāng)機(jī)情況,也造成半導(dǎo)體製造過(guò)程的不確定性; (6)工作站可能因?yàn)楫a(chǎn)品種類、數(shù)量變化或當(dāng)機(jī)等因素,造成某設(shè)備的機(jī)臺(tái)的需求突然升高,因此瓶頸機(jī)臺(tái)會(huì)因不同的狀況與條件而移動(dòng),因而產(chǎn)生瓶頸機(jī)臺(tái)漂移的現(xiàn)象。 決策分析研究室 資料的價(jià)值 ? 高科技產(chǎn)業(yè)的顧客最關(guān)心的是什麼? ? 有變異存在嗎? ? 如何降低(產(chǎn)品、製程)變異,以提升服務(wù)品質(zhì)? ? 如何提昇(故障排除)效率,以提升服務(wù)品質(zhì)? ? 如何創(chuàng)造(資訊)價(jià)值,以提升服務(wù)品質(zhì)? ? 如何提升服務(wù)品質(zhì),以提升企業(yè)競(jìng)爭(zhēng)力? 資料是資產(chǎn)或負(fù)債??? 決策分析研究室 Dimension MIS DSS EIS EDA Applications Production, Control, Monitoring,… Complex integrated problem areas Support to top management decisions Quality Yield Improvement Primary Output Predefined periodic reports Information to support specific decisions Status access, exception reporting, Key indicators Nonscheduled analysis, Quality related information, Yield Status, Users Middle management, functional users Analysts, Managers, usually limited Senior executive or managers Product/Process/… engineers and managers Impetus Efficiency Effectiveness Timeliness Efficiency Effectiveness Design Function Oriented Problem Oriented Management Oriented Analysis Oriented Model None Yes/ LP, Bayesian,… None Statistical assumption Development Team User with IT Domain Expert, IT Managers with IT Domain Expert, Statistician, IT Specialist Integrated special software Usually none Yes EIS package or Tool Statistical software, Data Mining algorithm EDA versus MIS/DSS/EIS 決策分析研究室 SPC/Monitor Correlation Test Statistic.(ANOVA/KW/ Decision Tree) Cluster/PCA SOM/Feature Extraction (Associate) Pattern Extraction(Neural Network) 晶圓製造流程 vs Data Flow Analysis Flow (彭誠(chéng)湧、簡(jiǎn)禎富, 2023) SPC/ Monitor Equipment Matching Cluster/PCA SOM/Feature Extraction Process Tools WAT parameters (Associate) Pattern Extraction(Neural Network) by Bin , Bin Value , Die Position Process (Major) Lot History by Route + Operation Tool + Process Date Time + Recipe + Operator Metrology Data (Lot/Wf/Site) Defect Count + Defect Type Comment Tool History by Tool Id + Date Time PM monitor data Tool Status WAT By Lot/Wf/Site Parameter Name Test Value Spec Limit Valid Limit SORT By Lot/Wf/Die Bin Name Bin Value Die Position Correlation( by Lot/Wf/Site) Metro. . WAT Metro. . SORT WAT . SORT … Test Statistic. TTest ANOVA KruskallWallis Decision Tree Data Flow Analysis Flow (彭誠(chéng)湧、簡(jiǎn)禎富, 2023) 決策分析研究室 此期間某參數(shù)異常 ,欲找出原因 分析 WAT參數(shù)對(duì)該參數(shù)的影響 找出異常量測(cè)參數(shù) 找出與異常參數(shù)相關(guān)的製程 例:某一期間生產(chǎn)之 lots Bin map周?chē)?failure較多 從相關(guān)製程中找出問(wèn)題機(jī)臺(tái) FMEA 半導(dǎo)體製程資料挖礦研究架構(gòu) (簡(jiǎn)禎富、蔡承勳, 2023) 晶圓圖分析 決策分析研究室 研究問(wèn)題 : 晶圓圖分類 (簡(jiǎn)禎富、林鼎浩、劉巧雯、彭誠(chéng)湧、徐紹鐘、黃佳琪,2023) ? 背景與動(dòng)機(jī)