光刻工作總結(jié)報告(編輯修改稿)
2025-02-06 05:05 本頁面
【文章內(nèi)容簡介】 e Modify field List dwm 3696 RETMAN 主操作界面 RETMAN PROGRAM WIDTH STREET OUTSIDE FIELD ARRAY OFFSET X— KEY TO REFERENCE YOFFET Y 0 Key ROTAT/CHECK PE INTERMIX WAFER RADIUS ROWS ?AMS N N 1 LENS RETICLE AUTOSTACK? TITLE HEIGHT COLUMN W 3 N 13 CHIP TITLE X Y Y RETMAN PROGRAM INITIALIZE RETICLE FIELD FILL % DICE = 5208 STEP = 63 X FSTEP Y FSTEP X CHIP Y CHIP X SCRIBE Y SCRIBE COLS 12 ROWS 9 MODIFY RETICLE KEY DEFINITIONS C CHANGE SINGLE CHIP A CHANGE ALL CHIP K ADD KEYS,LEFT ,RIGHT,BOTH,NONE O ENTER A CHIP OFFSET D DELETE CHIP E ENLARGE VIEW R ROTATE CHIP 90 DEGREE RETMAN PROGRAM KEY HAMS SCAN/ALIGN 1 PE INTERMIX Y WAFER RADIUS KEY TO BSLN RETICLE 3 LOCAL PREALIGN N AUTOSTACK? N TITLE HEIGHT MIN. DICE/STEP 1 X Y SCAN KEY POSIONS PRMARY OAT SECOND OAT STEPPING DISTANCE STEP ARRAY OFFSET STACKING DISTANCE 0 0
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