集成電路工藝和版圖設(shè)計(jì)參考(完整版)
【正文】 local routing density ? Detailed route: Generate routing layout Channel based Channel less 2022/2/4 Jian Fang 76 ? Performance of submicron CMOS IC’s are to a large extent determined by place amp。 2022/2/4 Jian Fang 23 CMOS ? CMOS： Complementary Symmetry Metal Oxide Semiconductor 互補(bǔ)對(duì)稱金屬氧化物半導(dǎo)體－特點(diǎn)：低功耗 VSS VDD Vo Vi CMOS倒相器 PMOS NMOS I/O I/O VDD VSS C C CMOS傳輸門 2022/2/4 Jian Fang 24 NSi P+ P+ n+ n+ P阱 D D Vo VG VSS S S VDD CMOS倒相器截面圖 CMOS倒相器版圖 2022/2/4 Jian Fang 25 pwell active poly N+ implant P+ implant omicontact metal A NMOS Example 2022/2/4 Jian Fang 26 pwell Pwell Active Poly N+ implant P+ implant Omicontact Metal 2022/2/4 Jian Fang 27 N－ type Si SiO2 光刻膠 光 MASK Pwell 2022/2/4 Jian Fang 28 N－ type Si SiO2 光刻膠 光刻膠 MASK Pwell 2022/2/4 Jian Fang 29 N－ type Si SiO2 光刻膠 光刻膠 SiO2 2022/2/4 Jian Fang 30 N－ type Si SiO2 SiO2 Pwell 2022/2/4 Jian Fang 31 pwell active Pwell Active Poly N+ implant P+ implant Omicontact Metal 2022/2/4 Jian Fang 32 N－ type Si SiO2 Pwell SiO2 光刻膠 MASK active MASK Active Si3N4 2022/2/4 Jian Fang 33 N－ type Si SiO2 Pwell SiO2 光刻膠 光刻膠 MASK active MASK Active Si3N4 2022/2/4 Jian Fang 34 N－ type Si SiO2 Pwell SiO2 光刻膠 光刻膠 Si3N4 2022/2/4 Jian Fang 35 N－ type Si SiO2 Pwell SiO2 場(chǎng)氧 場(chǎng)氧 場(chǎng)氧 Pwell Si3N4 2022/2/4 Jian Fang 36 N－ type Si SiO2 Pwell 場(chǎng)氧 場(chǎng)氧 場(chǎng)氧 Pwell 2022/2/4 Jian Fang 37 N－ type Si SiO2 Pwell SiO2 場(chǎng)氧 場(chǎng)氧 場(chǎng)氧 Pwell poly 2022/2/4 Jian Fang 38 active pwell poly Pwell Active Poly N+ implant P+ implant Omicontact Metal 2022/2/4 Jian Fang 39 N－ type Si SiO2 Pwell SiO2 MASK poly 場(chǎng)氧 場(chǎng)氧 場(chǎng)氧 Pwell poly 光刻膠 2022/2/4 Jian Fang 40 N－ type Si SiO2 Pwell SiO2 MASK poly 場(chǎng)氧 場(chǎng)氧 場(chǎng)氧 Pwell 光刻膠 poly 2022/2/4 Jian Fang 41 N－ type Si SiO2 Pwell SiO2 場(chǎng)氧 場(chǎng)氧 場(chǎng)氧 Pwell poly 2022/2/4 Jian Fang 42 N－ type Si SiO2 Pwell SiO2 場(chǎng)氧 場(chǎng)氧 場(chǎng)氧 Pwell poly 2022/2/4 Jian Fang 43 active pwell poly N+ implant Pwell Active Poly N+ implant P+ implant Omicontact Metal 2022/2/4 Jian Fang 44 N－ type Si SiO2 Pwell SiO2 MASK N+ 場(chǎng)氧 場(chǎng)氧 場(chǎng)氧 Pwell poly 光刻膠 2022/2/4 Jian Fang 45 N－ type Si SiO2 Pwell SiO2 場(chǎng)氧 場(chǎng)氧 場(chǎng)氧 Pwell 光刻膠 poly N+ implant S/D 2022/2/4 Jian Fang 46 active pwell poly P+ implant Pwell Active Poly N+ implant P+ implant Omicontact Metal 2022/2/4 Jian Fang 47 N－ type Si SiO2 Pwell SiO2 MASK N+ 場(chǎng)氧 場(chǎng)氧 場(chǎng)氧 Pwell poly 光刻膠 光 S/D 2022/2/4 Jian Fang 48 N－ type Si SiO2 Pwell SiO2 場(chǎng)氧 場(chǎng)氧 場(chǎng)氧 Pwell S/D poly 光刻膠 P+ implant P+ 接觸 2022/2/4 Jian Fang 49 N－ type Si SiO2 Pwell SiO2 場(chǎng)氧 場(chǎng)氧 場(chǎng)氧 Pwell poly S/D P+ 接觸 2022/2/4 Jian Fang 50 active pwell poly P+ implant N+ implant omicontact Pwell Acti
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