【正文】 S ie v e 3 3 2 7 2 125C E Matrix Proces Step/Part Number Potential Failure ModePotential Failure Effects SEV Potential Causes OCC Curent Controls DETRPN Actions ReendedResp.COATING IMAGING DIRTY PHOTOMASK MICROCRACKING, DELAMINATION, STREAKS8LOW FREQUENCY OF CLEANING8SOP, VISUAL INSPECTION7 448INCREASE FREQUENCY TO ONCE EVERY 20 PANELSMGIMPROVE CLEANING METHOD PFPURCHASE OFFLINE CLEANING SYSTEM MGTEST ONLINE MASK REPLACEMENT PFFMEA Process Step Input OutputProcess Specification (Target, LSL, USL)Cpk Mean SigmaMeasurement Technique%RR P/TSample SizeSample FrequencyControl Method Reaction PlanCoating Dosage , 22, 23 UIL1700 25% 1/hr Autotimer Cross checkCoating Height24,23,25 Micrometer 31%/ 35 pts per panel1/hr Coating pump speedAdjust previousCoating width14,1 ,16 Laser Measuring Device1/hr None in placeCoating length36,34,38 Laser Measuring Device1/hr None in placeVacuum 35 Hg Vacuum Gauge 1/hr Monitor Compare guages, look for blockage工程能力和管理計劃的初步評估 OUTPUTS INPUTS Customer Requirement (Output Variable)Measurement Technique%RR or P/T RatioUpper Spec LimitTargetLower Spec LimitCp Cpk Sample Size Date ActionsGel TimeViscosityCleanlinessColorHomogeneityConsistencyDigets TimeTemperatureSolidsKey Process Output V riableCapability Status SheetI n p u t T y p e O u t p u tA g i t s p e e d C o n t r S t a b t i m eT e m p e r a t u r e C o n t r S t a b i l i z e A c i d n u m b e rP r e s s u r e C o n t r C o l o rA i r f l o w C o n t r P u t i n s e t p o i n t s V i s c o s i t y% O 2 i n a i r N o i s e S l o w l y r e d u c e p r e s s R e a c t o r t e m pA i r t e m p C o n t r M o n i t o r t e m p T e m p p r o f i l eO f f g a s f l o wO f f g a s c o m pH T c o e f fB e l t s p e e d C o n t r F i n i s h t i m eB e l t t e m p C o n t r F i n i s h A c d n u m b e rF l o w r a t e C o n t r C o l o rN o z z l e t y p e S O P C h e c k n o z z l e t y p e V i s c o s i t yH o l e s i z e C o n t r P u t i n s e t p o i n t s D r o p P o i n tR o o m t e m p N o i s e M o n i t o r a p p e a r a n c e H a r d n e s sA g i t s p e e d C o n t r P e l l e t a p p e a rT a n k t e m p C o n t rI n p u t T y p e O u t p u tW a x g r a d e S O P P r e p t i m eA m t w a x C o n t r P r e p a r e R e a c t o r A c i d n u m b e rC h a r g e r a t e C o n t r V i s c o s i t yA g i t s p e e d C o n t r C h a r g e m e l t e d w a x R e a c t o r t e m pR x n t e m p C o n t r B r i n g t o r e a c t i o n t e m p T e m p p r o f i l eP r e s s u r e C o n t r H T c o e f fA i r f l o w C o n t r% O 2 i n a i r N o i s eV i s c o s i t y N o i s eW a x t e m p N o i s eA N t a r g e t S O P O x i d t i m eA g i t s p e e d * C o n t r O x i d i z e A c i d n u m b e rT e m p e r a t u r e * C o n t r C o l o rP r e s s u r e * C o n t r P u t i n s e t p o i n t s V i s c o s i t yA i r f l o w * C o n t r S a m p l e h o u r l y R e a c t o r t e m p% O 2 i n a i r N o i s e M o n i t o r a c i d n u m b e r T e m p p r o f i l eA i r t e m p C o n t r O f f g a s f l o wA i r h u m i d i t y N o i s e O f f g a s c o m pH T c o e f fR e s p t i m eProcess Map和其他工具間的關系 管理計劃初期評價 在完成工程繪圖后，開始管理計劃的初步評估 給可控的、關鍵性的輸入和輸出增加測量技術，作業(yè)規(guī)格，和目標值 P ro cess S tep In p u t O u tp u tP ro cess S p ec (L S L , U S L , T arg et)C p k / D ate (S am p le S ize) M easu rem en t S ystem% R R o r P /TC u rren t C o n tro l M eth o d (fro m F M E A )W h o W h ere W h en R eactio n P lanC u rren t C o n tro l P lan靜夜四無鄰，荒居舊業(yè)貧。 流程步驟 時間（小時） ) 增值 非增值 糾正錯誤 控制 /檢驗 耽擱 準備 /設定 運輸 /移動 總計 1 2 3 4 5 6 7 8 9 10 總計 %總計 12 10 1 10 20 6 10 1 10 20 100 100% 2 6 52 30 100 10 2% 6% 5 2% 30% 10% 100% 物件情況如何？ 收到郵件 辦理 定單 輸入 數(shù)據(jù) 核實 包裝 安排 工作時間 發(fā)往 生產部門 1 小時 澄清 定單 輸入 定單 4小時 30 分鐘 核查 信用