【正文】 微波 6 16 96 微波 7 17 97 微波 8 18 98 7 of 127 7 Decentralized peripheral ET200M 分散的外圍設(shè)備 ET200M Peripheral node 1 (Power distribution Node) 外圍節(jié)點(diǎn) 1 (電源分配節(jié)點(diǎn) ) Designation 名稱 單元個數(shù) 分散的外圍系統(tǒng) ET200M (IM 153) 1 S7300 數(shù)字輸入 SM321, potentials separated, 16DI 3 S7300 數(shù)字輸出 SM322, 16DO 2 S7300 模擬輸入 SM331, potentials separated, 8AI 2 S7300 信號模塊的前端插頭 7 Peripheral node 2 (Machine Node A2) 外圍節(jié)點(diǎn) 2 (機(jī)器節(jié)點(diǎn) A2) Designation 名稱 Number of units 分散的外圍系統(tǒng) ET200M (IM 153) 1 S7300 數(shù)字輸入 SM321, potentials separated, 16DI 5 S7300 數(shù)字輸出 SM322, 16DO 2 S7300 信號模塊的前端插頭 7 Peripheral node 2 (Machine Node A3) 外圍節(jié)點(diǎn) 2 (機(jī)器節(jié)點(diǎn) A3) Designation 名稱 Number of units 分散的外圍系統(tǒng) ET200M (IM 153) 1 S7300 數(shù)字輸入 SM321, potentials separated, 16DI 3 S7300 數(shù)字輸出 SM322, 16DO 1 S7300 模擬輸入 SM331, potentials separated, 8AI 1 S7300信號模塊的前端插頭 5 8 of 127 8 Software 軟件 Windows 2020 English with Service Pack 4 is used as operating system for controlling and operating PC. 采用 Windows 2020 English with Service Pack 4 操作系統(tǒng)。 幾個裝置（ Eurotherm 加熱器 ，閥組，質(zhì)量流量計，伺候電動機(jī)）直接連接于 Profibus。 Service mode for supporting system startup, troubleshooting, system and controller configuration using machine parameters 維護(hù)模 式：支持系統(tǒng)啟動，故障診斷， 使用機(jī)器參數(shù)進(jìn)行系統(tǒng)和 控制器布局。以下是它的功能列表： ? Full graphical representation of the system layout and the current process sequence as well as display of all aggregate conditions and process status conditions. 全部 圖像表示系統(tǒng)布局、當(dāng)前工藝次序、并 顯示所有總體狀況和工藝狀態(tài)。 1 of 127 1 操作手冊 SINAL – 系統(tǒng) 氮化硅沉積系統(tǒng) （人工裝載） 制造商 : Roth amp。 ? Full graphical trend functions for present values as a processrelated trend. 針對 工藝相關(guān)趨勢的 當(dāng)前 數(shù)值，系統(tǒng)具有 全部 的 圖像趨向功能 。 Identification of hard and software 硬件和軟件的識別 Hardware硬件 The control software for the SiNA L system is installed on an industrial PC (Intel Celeron GHz, 256 MB RAM, 80 GB Seagate HDD, “ FD, LG DVD CDROM, AOpen graphics card, work interface card on board, Windows 2020 English + Service Pack 4). This PC includes a 15 TFT color monitor and a 19 keyboard with touch pad. SiNA L系統(tǒng)的控制軟件安裝在 PC機(jī)上（ Intel 賽揚(yáng) 5 of 127 5 ， 256MB RAM， 80GB希捷硬盤， ， LG DVD CDROM，圖形卡，網(wǎng) 卡， Windows 2020 English + Service Pack 4）， 15寸 TFT液晶顯示器， 19寸鍵盤，觸摸墊板。這允許快速直接訪問每個裝置的參數(shù)組。 Visual system with VAC_NT, Version 帶 VAC_NT的可視化系統(tǒng) , Graphic visualization of all data, set points, process states and user inputs 所有數(shù)據(jù)， 設(shè)定點(diǎn)，過程狀態(tài)和用戶輸入的圖像可視化 Menucontrolled process operating with keyboard and touch 板的菜單控制過程操作 Manual operation for selected functions. 已 選 功能的人工操作 Automatic operation for processes using parameters 使用參數(shù)過程的自動操作 Databaseoriented control and management of procedures 數(shù)據(jù)庫導(dǎo)向控制和管理程序 Eventcontrolled message logging 事件控制信息的錄入 Protocol recording during the process run 工藝運(yùn)行過程的協(xié)議記錄 Diagnosis function (I/O list) 診斷功能 (I/O 清單 ) Installation instruction for the main ponents 主要元件的安裝指示 For the installation of the SIMATIC peripheral ponents see the section in the System manual “Local peripheral equipment ET200M” (Order No.: 6ES7 1531AA018AA0). SIMATIC外圍元件的安裝參見系統(tǒng)手冊 “Local peripheral equipment ET200M” (Order No.: 6ES7 1531AA018AA0). 9 of 127 9 For SINECL2 connection ply with the Technical Description and the Installation Guidelines in the Manual “CP5613”. SINECL2的連接 遵守技術(shù)描述和和安裝向?qū)?，在手?“CP5613”。 Manual. 系統(tǒng)可以通過鍵盤和鼠標(biāo)（觸摸板）操作，和 Windows操作方式一致。 手冊。 Click on the radio button with the left mouse key to enable the radio button. Or 鼠標(biāo)左鍵 點(diǎn)擊單選 按鈕使之啟用 。 Lists 列表 The object “l(fā)ist” is intended to display large data amounts. It is used in many menus (. control menu for technology selection). The options available in the list are displayed below each other. 對象 “l(fā)ist” 用來顯示大量的數(shù)據(jù)。 List里面當(dāng)前的位置是高亮度顯示。然后按下 [Alt] + [Up arrow] or [Alt] + [Down arrow]來打開 list。 檢驗欄 類似 ON/OFF開關(guān)。 Input and output frames 輸入和輸出框 A frame is a rectangular window which serves for input and/or output of text and numbers (. for setpoints input in manual mode or to input parameters for technologies). Input frames have a white background and output frames are indicated by a colored background. It has a variety of functions: 該框 為長方形窗口，作為文本和數(shù)字（如手動模式的輸入設(shè)置或工藝參數(shù)輸入）輸入和 /或輸出。 或者 Hold the left mouse key and move the mouse across the text. 按住鼠標(biāo)左鍵同時在文本上移動鼠標(biāo)。 Note 注釋 : Entries in the frames bee valid if: 有效登 錄進(jìn)入 框架的條件： : － the entry has been pleted with 登錄完成并 帶有 記號 。 14 of 127 14 3 Switching ON/OFF the control system 控制系統(tǒng)的切換開關(guān) ON/OFF Switching on 打 開 Simultaneously with switching on, the operating and control puter is started. The PC is switched on by pressing the power button behind the disk protection. 打開開關(guān)，操作和控制計算機(jī) 同時 啟動。的登錄－操作計算機(jī)啟動后，出現(xiàn) window界面。屏幕前臺出現(xiàn)登 錄 窗口要求輸入用戶名和密碼。 standard (Start → Shut down → Shut down). 現(xiàn)在 電腦可以根據(jù) Windows174。 16 of 127 16 4 Function description and operating 功能描述和操作 Operating the system by keyboard and mouse (touch pad) can be performed in the same manner as WINDOWS174。用戶界面采用輸入單元（數(shù)字、文本、表格的輸入框架）， 與 WINDOWS174。 red → error). 標(biāo)題總是可視的并顯示日期，時間和當(dāng)前的系統(tǒng)用戶。 The color of the ?rotating flashing light? is pointing to the state of the system (red → error me ssage。 18 of 127 18 Message line 信 息欄 圖 4：信息欄 The message line extends across the plete screen width below the image are