【正文】 o delete the text to the right or press [←] to delete the text to the left. 點(diǎn)擊框架，按下 [Del]鍵刪除右邊的文本，或者按下 [←]鍵刪除左邊的文本。它們有許多不同的功能。 Simply click on the checkbox with the left mouse key to enable / disable the checkbox. 使用 鼠標(biāo)左鍵點(diǎn)擊 來 啟用 /關(guān)閉 檢驗(yàn)欄 。按下 [Enter]確認(rèn)， list關(guān)閉。 點(diǎn)擊 鼠標(biāo) 確認(rèn)選擇對(duì)象， list關(guān)閉 。列表里面可用的選項(xiàng) 逐 行顯示。之后按下 [左 箭頭 ]或者 [右箭頭 ]來啟用單選 按鈕。至少有一個(gè)按鈕在任何時(shí)候總是激活的 。標(biāo)準(zhǔn)，用戶界面采用輸入元件 (數(shù)字和文本輸入框架，表格， …) 。. The user surface uses input elements (numerical and text input frames, tables, …) according to the WINDOWS 174。 The plasma sources are driven through a CAN bus plugin card (PCI 331) in the PC.等離 子源通過一個(gè) CAN總線插入式卡（ PCI 331）驅(qū)動(dòng)。 CP 5613 (Profibus DP)集成在 PC機(jī)上， 根據(jù)工藝通道的記錄， 擴(kuò)充 I/O零件。 ? Operation in the following modes: 運(yùn)行于以下 模式 ： Process mode for automatic operation with full recipe management, online parameter settings and protocol function 工藝模式：自動(dòng)操作， 帶有 全部配方管理，在線參數(shù)設(shè)定和協(xié)議功能。有 5個(gè)工藝腔室，連續(xù)流動(dòng)控制 的工作方式。 Rau AG Gewerbering 3 D09337 HohensteinErnstthal, OT Wuestenbrand Germany 2 of 127 2 目錄 1 引言 ....................................................................................................... ... .4 應(yīng)用和使用 ……... ...........................................................................................4 硬件和軟件的識(shí)別 ……………… ..................................................................4 硬件 …... ...............................................................................................................4 軟件 ….. ................................................................................................................7 主要元件的安裝介紹 …………………………. .............................................7 2 一般的操作說明 …………... ......................................................................8 射頻按鈕 ..........................................................................................................8 按鈕 ..................................................................................................................8 清單 .................................................................................................................8 檢驗(yàn)盒 ..............................................................................................................9 輸入和輸出框架 ………. ....................................................................................9 Tool tip..............................................................................................................9 3 開 /關(guān)控制系統(tǒng) ..........................................................................................10 打開 ................................................................................................................10 關(guān)閉 ................................................................................................................10 4 功能描述和操作 ……………………... .............................................................11 標(biāo)題 ................................................................................................................12 信息線 ............................................................................................................12 動(dòng)態(tài)菜單 ........................................................................................................13 靜態(tài)菜單 ........................................................................................................13 圖象區(qū)域 ........................................................................................................14 5 標(biāo)準(zhǔn)功能 ……… .......................................................................................16 系統(tǒng) ................................................................................................................16 ……... ..............................................................................................19 氣體系統(tǒng) ........................................................................................................23 參數(shù) ................................................................................................................26 系統(tǒng)參數(shù) ...........................................................................................................26 工藝參數(shù) ...........................................................................................................30 氣體參數(shù) ...........................................................................................................33 配方 ................................................................................................................35 趨向 ................................................................................................................39 協(xié)議 ................................................................................................................42 上升率測(cè)試 … ................................................................................................43 3 of 127 3 外蓋控制 …. ...................................................................................................44 控制 ..............................................................................................................44 泵 ..................................................................................................................46 人工傳輸 …… ..............................................................................................48 6 維護(hù) ...........................................................................................................50 測(cè)試點(diǎn) ……….. ..............................................................................................50 主要分布 ............................................................................................................51 機(jī)械節(jié)點(diǎn) A2.......................................................................................................54 機(jī)械節(jié)點(diǎn) A3...............................................