【正文】 經(jīng)典資料， WORD 文檔，可編輯修改，歡迎下載交流。 經(jīng)典資料， WORD 文檔，可編輯修改，歡迎下載交流。 1 操作手冊(cè) SINAL – 系統(tǒng) 氮化硅沉積系統(tǒng) （人工裝載） 制造商 : Roth amp。 Rau AG Gewerbering 3 D09337 HohensteinErnstthal, OT Wuestenbrand Germany 經(jīng)典資料， WORD 文檔，可編輯修改，歡迎下載交流。 經(jīng)典資料， WORD 文檔，可編輯修改，歡迎下載交流。 2 目錄 1 引言 ....................................................................................................... ... .4 應(yīng)用和使用 ……... ...........................................................................................4 硬件和軟件的識(shí)別 ……………… ..................................................................4 硬件 …... ...............................................................................................................4 軟件 ….. ................................................................................................................7 主要元件的安裝介紹 …………………………. .............................................7 2 一般的操作說(shuō)明 …………... ......................................................................8 射頻按鈕 ..........................................................................................................8 按鈕 ..................................................................................................................8 清單 .................................................................................................................8 檢驗(yàn)盒 ..............................................................................................................9 輸入和輸出框架 ………. ....................................................................................9 Tool tip..............................................................................................................9 3 開(kāi) /關(guān)控制系統(tǒng) ..........................................................................................10 打開(kāi) ................................................................................................................10 關(guān)閉 ................................................................................................................10 4 功能描述和操作 ……………………... .............................................................11 標(biāo)題 ................................................................................................................12 信息線 ............................................................................................................12 動(dòng)態(tài)菜單 ........................................................................................................13 靜態(tài)菜單 ........................................................................................................13 圖象區(qū)域 ........................................................................................................14 5 標(biāo)準(zhǔn)功能 ……… .......................................................................................16 系統(tǒng) ................................................................................................................16 ……... ..............................................................................................19 氣體系統(tǒng) ........................................................................................................23 參數(shù) ................................................................................................................26 系統(tǒng)參數(shù) ...........................................................................................................26 工藝參數(shù) ...........................................................................................................30 氣體參數(shù) ...........................................................................................................33 配方 ................................................................................................................35 趨向 ................................................................................................................39 協(xié)議 ................................................................................................................42 上升率測(cè)試 … ................................................................................................43 經(jīng)典資料， WORD 文檔，可編輯修改，歡迎下載交流。 經(jīng)典資料， WORD 文檔，可編輯修改，歡迎下載交流。 3 外蓋控制 …. ...................................................................................................44 控制 ..............................................................................................................44 泵 ..................................................................................................................46 人工傳輸 …… ..............................................................................................48 6 維護(hù) ...........................................................................................................50 測(cè)試點(diǎn) ……….. ..............................................................................................50 主要分布 ............................................................................................................51 機(jī)械節(jié)點(diǎn) A2.......................................................................................................54 機(jī)械節(jié)點(diǎn) A3.......................................................................................................56 等離子源 ............................................................................................................58 傳輸系統(tǒng) ............................................................................................................59 氣體系統(tǒng) ............................................................................................................61 登錄和退出 ….. ..............................................................................................62 用戶管理 ……….. ..........................................................................................63 診斷 (只針對(duì)有權(quán)限人員 )...........................................................................64 7 信息列表 ...