array工藝技術(shù)基礎(chǔ)-展示頁
2025-05-16 18:03本頁面
【正文】 、 Magic Bar運動的 Motor等。Change life with heart Array 工藝技術(shù)簡介 ?? B2 Project Team Array工 藝構(gòu) 成 ?? B2 Project Team ThinFilm EQP L/UL Chamber：在 ATM和Vacuum兩個狀態(tài)之間傳送 Glass的Chamber Transfer Chamber：把玻璃基板在各個周邊的 Chamber之間進(jìn)行傳送的 Chamber，內(nèi)有一個 Vacuum Robot。 Sputter Chamber：進(jìn)行Deposition的 Chamber。 SputterSP Chamber ?? B2 Project Team System Components ? Automated cassette load station ACLS (optional) The system hardware consists of three major ponents: ?Mainframe ?Remote modules ?? B2 Project Team Remote Support Equipment Heat Exchanger The heat exchanger provides DI water to the RF match for cooling purposes Process Pumps Provides vacuum to the process chambers RF generator The RF generator supplies Radio Frequency to the process chamber for the purpose of creating a plasma Mainframe Pump Provides vacuum to the transfer and loadlock chambers. Remote AC Power Box Facility power is connected from customer facilities to the remote AC power box on the remote service module All electrical power to the system is distributed from the AC power box ?? B2 Project Team Deposition PECVD GAS IN Plasma GAS OUT Glass ~ RF Power SiH4,NH3 PH3等 4EA GND Diffuser Susceptor Process chamber ?? B2 Project Team Deposition PECVD ACLS Automatic Cassette Load Station Load lock Chamber Transfer Chamber (XFer) Process Chamber ?? B2 Project Team Layer 名稱 使用氣體
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