【正文】 素影響： ? 探頭聚焦聲波波束在被檢測材料與中間耦合劑之間的折射率 N： N= CL, Material / C L,Water 這里 C L, Material表示聲波在被檢測材料內(nèi)的縱向速度， C L,Water表示聲波在中間介質(zhì)中的傳播速度（通常用水 C L,Water = mm/181。但實際的焦點直徑非常難精確的測量出來，因為聲波聚焦點沒有明確的邊界，而是以不同灰度形狀環(huán)繞在一起。 Special Parameter of Transducers for AMI 超聲波掃描探頭選擇的主要參數(shù) SKLMS 機械制造系統(tǒng)工程國家重點實驗室 STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING 二、靈敏度： 超聲波顯微鏡探頭的靈敏度影響到儀器分辨率所能達到的水平，一般的探頭只能達到波長 L的 1/2，而比較好的探頭則能達到波長 L的 1/3。 Beam from a Focused Transducer 聚焦超聲波傳感器探頭 Sonoscan擁有自己研發(fā)制造唯一的多款同一頻率不同 FL的探頭 SKLMS 機械制造系統(tǒng)工程國家重點實驗室 STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING Focal plane Spot size Hourglass shaped beam that narrows to the spot size at the waist Depth of Field ?X = Spot size = ? Resolution (reflection mode) = ?X() ?Z = Depth of field = (F)2? Example: 50MHz and F2 in water DX is mm, resolution is and DZ is mm Focal Length Diameter Velocity (mm/ms) Frequency (MHz) F = ? = Focal Length Beam from a Focused Transducer 聚焦超聲波傳感器探頭 Sonoscan擁有自己研發(fā)制造唯一的多款同一頻率不同 FL的探頭 SKLMS 機械制造系統(tǒng)工程國家重點實驗室 STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING 一、分辨率： 超聲波顯微鏡的分辨率主要受探頭的頻率影響，理論分辨率可以達到聲波在材料內(nèi)的波長 L的 1/2～ 1/3, 這里波長 L， L＝ V / f 這里 V表示聲波在材料內(nèi)縱向傳播速度， f 表示探頭的頻率，可見探頭頻率越大，則分辨率越大。 ) Acoustic Micro Imaging (超聲波微成像 ) SKLMS 機械制造系統(tǒng)工程國家重點實驗室 STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING Time Distance Relationship Ultrasound Two Modes (超聲波兩種工作方式 ) 1. Pulse Echo or CMode Technique (反射方式 ) Level specific (針對特定的層面 ) 2. Through Transmission or TScan Technique (透射方式 ) Entire thickness of the sample (整個厚度 ) Graphical Presentation of Working Principle (基本工作原理圖示 ) SKLMS 機械制造系統(tǒng)工程國家重點實驗室 STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING Transmitter (發(fā)射器 ) Pulser (脈沖發(fā)生器 ) Water (媒介水 ) Lens (鏡頭 ) Transducer (傳感器 ) Pulse Echo or CMode technique is a level specific scan. The images have a sharp focus as the data from the CMode scan is based on data from a specific level in the device. PulseEcho or CMode Technique (反射方式 ) Amplifier (信號放大 ) Sample (樣品 ) SKLMS 機械制造系統(tǒng)工程國家重點實驗室 STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING Through Transmission or TScan is a nonlevel specific scan. The ultrasound is passed through the entire thickness of the device. TScan is a nonambiguous technique as ultrasound can not pass through an air gap. Through Transmission or TScan Technique (透射方式 ) Transmitter (發(fā)射器 ) Amplifier (信號放大 ) Pulser (脈沖發(fā)生器 ) Transducer (傳感器 ) Transducer (接收傳感器 ) Water (媒介水 ) Lens (鏡頭 ) Sample (樣品 ) SKLMS 機械制造系統(tǒng)工程國家重點實驗室 STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING Some sound transmitted No sound transmitted Some sound reflected All the sound reflected Delamination Technique Result Comment Reflection (反射模式 ) Ultrasound is reflected more from bad bond than good bond (壞的粘合面反射的能量高過好的粘合面 ) ? Interpret Echoes ? Isolate Layers ? Sharp Pictures (特定的層面，圖像清晰 ) Transmission (透射模式 ) No ultrasound crosses air gap (不能穿過空氣 ) ? No ambiguity (不準確 ) ? Composite image throughout entire part thickness ? Image may be a little fuzzy (圖像不如反射方式清楚 ) PulseEcho vs. ThruScan (反射 ) SKLMS 機械制造系統(tǒng)工程國家重點實驗室 STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING Reflection Mode (反射模式 ): One Transducer both sends and receives the ultrasound Transmission Mode (透射模式 ): Sending Transducer Receiving Transducer PulseEcho vs. ThruScan (反射 ) SKLMS 機械制造系統(tǒng)工程國家重點實驗室 STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING 超聲檢測設(shè)備的參數(shù)和軟件介紹 SKLMS 機械制造系統(tǒng)工程國家重點實驗室 STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING 主要組成 ?Stepper motors 步進馬達 ?Linear motion systems amp。 cracks in Metals Ceramics Medical Ultrasound Hermetic Seal Integrity Peration (穿透能力 ) Resolution (分辨率 ) Frequency, Resolution and Peration (頻率、分辨率和穿透力 ) SKLMS 機械制造系統(tǒng)工程國家重點實驗室 STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING SKLMS 機械制造系統(tǒng)工程國家重點實驗室 STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING ? Higher frequency, ↑higher resolution, ↓lower peration. (更高的頻率，則擁有更高的分辨率，更低的穿透能力 ) ? Thicker parts require lower frequencies to maintain peration depth. (更厚的樣品需要較低頻率的探頭來維持較好的穿透厚度 ) ? Higher attenuation materials such as plastics require lower frequencies. (高衰減的材料：如塑料等要求較低頻率 ) ? Lower attenuation materials such as Si can be inspected using higher frequencies. (低衰減的材料：如硅材等能使用較高頻率來掃描檢測 ) Frequency, Resolution and Peration (頻率、分辨率和穿透力 ) SKLMS 機械制造系統(tǒng)工程國家重點實驗室 STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING 醫(yī)用 B超： 分辨率范圍 cmmm 頻率范圍 500KHz1MHz 聲納： 分辨率范圍 mcm 頻率范圍 20KHz500KHz 超聲波顯微鏡： 分辨率范圍 mmμmnm 頻率范圍 5MHz2GHz Classification (超聲波功能儀器的分類 ) SKLMS 機械制造系統(tǒng)工程國家重點實驗室 STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING Advantage of Acoustic Micro Imaging (超聲波微成像的優(yōu)點 ) 超聲波顯微成像 (AMI)利用高頻率的超聲波 (一般在 5MHz以上 )探測物體內(nèi)的結(jié)構(gòu)、缺陷、以及對材料做定性分析。 ) ? Acoustic Impedance (Z) the product of the density of the material and the velocity of ultrasound (Z =?V). (聲阻抗是物質(zhì)的密度和超聲波在該物質(zhì)中的傳播速度的乘積。 ) Basics of Ultrasound (超聲波基礎(chǔ) ) SKLMS 機械制造系統(tǒng)工程國家重點實驗室 STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING Ultrasound at Interfaces (界面處的超聲波 ) ? When an ultrasound pulse impinges on an interface, part of the energy is reflected and part transmitted. (在界面處的超聲波，有些會被反射，有些會穿過該界面。SKLMS 機械制造系統(tǒng)工程國家重點實驗室 STATE KEY LABORATORY FOR MANUFACTURING SYSTEMS ENGINEERING 超聲波掃描顯微鏡 Scanning Acoustic Microscope Sonoscan D9500 SKLMS 機械制造系統(tǒng)工程國家重點實驗室 STATE KEY LABORATORY FOR