【正文】 ........................................................................... 22 主要原輔材料、公用工程消耗及來(lái)源 ........................................................................................... 22 輔助公用工程及設(shè)施 ......................................................................................................................... 22 3 工程分析 .......................................................................................................................................................... 25 3 工藝技術(shù)方案 ............................................................................................................................................. 25 工藝技術(shù)路線確定 ............................................................................................................................. 25 生產(chǎn)方法和反應(yīng)原理 ........................................................................................................................ 25 工藝流程及產(chǎn)污分析 ................................................................................................................................ 27 氫氣制備與凈化工序 ................................................................................................................. 27 氯化氫合成工序 ................................................................................................................................. 27 三氯氫硅合成工序 ............................................................................................................................. 28 合成氣干法分離工序 ......................................................................................................................... 28 氯硅烷分離提純工序 ......................................................................................................................... 29 三氯氫硅氫還原工序 ......................................................................................................................... 29 還原尾氣干法分離工序 .................................................................................................................... 30 四氯化硅氫化工序 ............................................................................................................................. 30 氫化氣干法分離工序 ......................................................................................................................... 31 氯硅烷貯存工序 ............................................................................................................................... 31 硅芯制備工序 .................................................................................................................................... 31 產(chǎn)品整理工序 ................................................................................................................................... 31 廢氣及殘液處理工序 ....................................................................................................................... 32 廢硅粉處理 ........................................................................................................................................ 32 工藝廢料處理工序 .......................................................................................................................... 32 水量平衡及物料平衡 ................................................................................................................................ 33 水量平衡 .............................................................................................................................................. 33 項(xiàng)目多晶硅裝置物料平衡 ................................................................................................................. 33 主要關(guān)心元素平衡 ............................................................................................................................. 33 污染物產(chǎn)生、治理措施及排放分析 ....................................................................................................... 33 施工期污染物產(chǎn)生、治理及排放 .................................................................................................... 33 營(yíng)運(yùn)期污染物產(chǎn)生、治理及排放分析 ............................................................................................ 34 非正常及事故排污分析 ..................................................................................................................... 41 項(xiàng)目 “三廢 ” 產(chǎn)生及排放匯總 ........................................................................................................... 41 項(xiàng)目選址及總圖布置的環(huán)境合理性分析 .............................................................................................. 42 項(xiàng)目選址的合理性分析 .................................................................................................................... 42 總圖布置的合理性分析 .................................................................................................................... 45 4 建設(shè)項(xiàng)目所在區(qū)域環(huán)境概況 ........................................................................................................................... 47 自然環(huán)境概況 ............................................................................................................................................ 47 地理位置 .............................................................................................................................................. 47 地形、地質(zhì)、地貌 ............................................................................................................................. 47 氣象條件 ............................................................................................................................................. 48 水文條件 ............................................................................................................................................. 48 主要植被及動(dòng)物資源 ........................................................................................................................ 48 礦藏 ...................................................................................................................................................... 49