dielectricpropertiescharacterizationofthin-filmslesbyusingscanningnear-fieldmicrowavemicro-資料下載頁(yè)
2024-10-04 17:08本頁(yè)面
【正文】 mined by the tip flatness and the tip shape. ?The flatter tip has the higher sensitivity. ?It plateaus when the flatness exceeds 3um. SENSITIVITY ANALYSIS SPATIAL RESOLUTION ?The electric field near the tip end is polarized along z. ?The electric field is maximum at the corner and decays rapidly ?The actual interaction area is an annular ring. ?The flatter tip has the lower spatial resolution. Ez dominates Tip edge Er Summary and Outlook ?A novel approach (Femlab+SNMM) to noninvasive thin film dielectric property determination . ?Measure dielectric constants at small length scales ?The spatial resolution is mainly determined by the tipsample spacing and the shape of the probe tip, rather than by the wavelength λ ?As tip gets flatter, sensitivity increases but spatial resolution decreases. ?Future work: loss tangent calculation temperature dependence of ferroelectrics permittivity and phase transition.
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