dielectricpropertiescharacterizationofthin-filmslesbyusingscanningnear-fieldmicrowavemicro(存儲(chǔ)版)
【正文】 ope is a good technique for doing this job. ?Femlab helps to solve the calculation problems. ?Several groups (Berkley, UMCP, Korean) have developed approaches for measuring material permittivity With SNMM based on different theories. Capabilities ? Dielectric measurements at GHz ? 200 nm spatial resolution (l = 16 cm) SNMM Experimental Setup Scanning NearField Microwave Microscope (SNMM) ?A sharp tip is brought into close enough proximity of the sample surface ?Where EM field are well described by the near field theory. ?Δf ∕ f ≈ 103 ?Femlab is used to calculate permittivity from the frequency shift. f0 f at contact Δf Nearfield electric potential by finite element method simulation ?1V potential is set on tip boundary ?Electrostatic mode is used for finding Efield. ?The strong electric field is confined in a small region (~1um). 120um 120um ?500,000 mesh points are in a 10*10um region.
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