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IEEE Transactions on Electron Devices. 2001, 48(4): 794~800哈爾濱工業(yè)大學碩士學位論文原創(chuàng)性聲明本人鄭重聲明：此處所提交的碩士學位論文《多晶硅納米膜歐姆接觸特性的研究》,是本人在導師指導下，在哈爾濱工業(yè)大學攻讀碩士學位期間獨立進行研究工作所取得的成果。據(jù)本人所知，論文中除已注明部分外不包含他人已發(fā)表或撰寫過的研究成果。對本文的研究工作做出重要貢獻的個人和集體，均已在文中以明確方式注明。本聲明的法律結果將完全由本人承擔。作者簽字： 日期： 年 月 日哈爾濱工業(yè)大學碩士學位論文使用授權書《多晶硅納米膜歐姆接觸特性的研究》系本人在哈爾濱工業(yè)大學攻讀碩士學位期間在導師指導下完成的碩士學位論文。本論文的研究成果歸哈爾濱工業(yè)大學所有，本論文的研究內容不得以其它單位的名義發(fā)表。本人完全了解哈爾濱工業(yè)大學關于保存、使用學位論文的規(guī)定，同意學校保留并向有關部門送交論文的復印件和電子版本，允許論文被查閱和借閱，同意學校將論文加入《中國優(yōu)秀博碩士學位論文全文數(shù)據(jù)庫》和編入《中國知識資源總庫》。本人授權哈爾濱工業(yè)大學，可以采用影印、縮印或其他復制手段保存論文，可以公布論文的全部或部分內容。作者簽名： 日期： 年 月 日導師簽名： 日期： 年 月 日致 謝本課題的研究工作自始至終都是在導師譚曉昀教授的悉心指導和關懷下進行并完成的，值此論文完成之際，謹向導師表示衷心的感謝。譚老師淵博的知識和敏銳的洞察力多次為我的論文指明方向、提出可行的研究方法，而且導師嚴謹求實的學術精神和誨人不倦的學者風范使我受益匪淺。施長治師兄對我的論文工作給予了無私的幫助，無論是初期的查閱資料、還是后期