【導(dǎo)讀】出的各種問題，縮減設(shè)備。因此，裝配等系統(tǒng)增加任何磨損的問題都會對微系統(tǒng)的。功能上產(chǎn)生極端影響。近年來，大多數(shù)微細(xì)的熱塑性塑料或脆性材料都會產(chǎn)生一種。然而，人們必須要牢記PIM的路線，使得它很難達(dá)到所要求的公差變小的要求。為了CIM，LIGA技術(shù)制成了模具鑲件。微細(xì)分別從基材分離，脫脂，表面粗糙度進(jìn)行了評估，流程進(jìn)行了優(yōu)化。其低粘度的處理。PIM是一種近凈成形制造工藝以及建立大規(guī)模生產(chǎn)。PIM的過程中使用的原料由聚合物粘結(jié)劑和金屬或陶瓷粉末組成。注塑成型后，大部分粘合劑從綠色部分被刪除?？紫毒W(wǎng)絡(luò)和粘結(jié)劑殘留量給予足夠的實(shí)力為處理組成部分粒子網(wǎng)絡(luò)。節(jié)，以防止凍結(jié)。通過分割平面時(shí)注射逃脫。大多不是在LIGA技術(shù)的模具插入微型特點(diǎn)是無過錯(cuò)。LIGA技術(shù)采用聚甲基丙烯酸甲酯作為抵制和鎳電鍍過程是由模具插入。菲爾”將是最好的選擇。不幸的是，這種類型的機(jī)器尚未提供項(xiàng)目啟動。

　　

【正文】 perly. Therefore, a wafer bonding unit by “Logitech” was used for bonding the microparts to the glass substrate. A flexible rubber membrane was sucked onto the microparts of any height by vacuum forcing them on the glass substrate. Then the stage was heated up to the desired temperature. The wax became fluid and the microparts sank down. Afterwards the stage was cooled down and the glass substrate with the bonded microparts could be released. The glass substrate was fixed on a vacuum stage on a lapping machine PM 5 by “Logitech” and lapped with 20 rpm and a load of 1 kg for 10 min using calcined alumina of 9 μm grain size. Then the microparts were checked and the procedure was repeated until the surfaces of all micoparts were lapped properly. For polishing the lapping machine was cleaned very carefully. A polishing disc with polyurethane surface and colloidal SiO2sol (Syton Typ SF 1) was used at 20 rpm and 1 kg load for 20 min. The resulting surfaces are displayed in Fig. 10. 4. Results and discussion Using isolated microparts a module of a micro annular gear pump could be assembled as shown in Fig. 11. However, no plete micro annular gear pump with housing was assembled yet. The surface and edge quality for lapping and polishing is a function of load respectively of lapped area, disc speed, lapping material and material to be lapped. Optimization is needed for each case. However, it turned out that lapping and polishing is the best choice and most efficient way for finishing, regardless of material, if applied appropriately. At the start of the project no experience for the absolute precision of LIGA regarding very tight tolerances was available. It was not clear whether diffraction effects at the mask, swelling of the resist when electroplating or other undesirable effects would lead to variations of a few microns pared to the CADdata. Therefore the diameter tolerances of +2 and 177。0 μm of the outline of the internal as well as the external rotor were included which normally would not fit to each other (pare Fig. 4). However, since it turned out that LIGA is absolutely precise in the mieter range, this is a problem especially for the external rotor because only tolerances of ?2 and ?4 μm are useful at all now. Another problem is the measure tracing for outline differences of 2 μm in diameter. For this, the finishing steps like lapping and polishing as well as absolute cleanliness of the microparts are a prerequisite. Neither the external rotor outline nor the internal rotor outline is strictly circular. For lubrication purposes the external rotor has four flattenings. Therefore, image processing is the best choice to detect different rotor tolerances via the cross sections variation. From the present point of view oversized rotors are not necessary even if required tolerances are in the micron range. Instead, the space on the LIGAmold insert should have been used for tolerances of ?6 and ?8 μm for the external rotor outline. 5. Conclusions It was possible to produce isolated ceramic microparts for a micro annular gear pump by micro powder injection molding and to meet very tight tolerances. LIGAmold inserts are very precise. Oversized tolerance variations are not necessary and can be saved. The geometrical precision of the microparts depends not only on the quality of the mold inserts but is also very sensitive to the feedstocks, first of all the particle shape, and to density gradients in the green parts resulting from micro injection molding. Absolute globular powder particles are an essential requirement for high shape accuracy. Special, for microparts adapted, injection machines like the Microsystem 50 by “Battenfeld” should be preferred to improve the relation of runner system to micropart and improve the overall process control. Thus, the homogeneity of the micropart can be improved and scrap can be reduced. In the project, a new method for the isolation of microparts was developed. Methods for fixing micro parts onto a substrate in one step very exactly as well as methods for finishing of micro parts of several materials with very high accuracy and very good surface quality were developed and demonstrated. Acknowledgement The project MALVE, subtask B, was funded by the BMBF as a “Strategiefondsprojekt” of the “HermannvonHelmholtzGemeinschaft Deutscher Forschungszentren” (HGF). We gratefully acknowledge the contribution and support of “Hydraulik Nord Parchim Mikrosysteme” for providing the design. We also thank our colleagues at Forschungszentrum Karlsruhe, GKSS Geesthacht, HMI Berlin and cooperating panies.