【文章內容簡介】
ess begins when the substrate is coated with an extremely thin liquid film of photosensitive material, called photoresis. The light then exposes the photoresist, some of which is destroyed when exposed to the light. The unnecessary portion of the material is then cleaned from the surface through another process, leaving an extremely fine pattern behind. Another layer of the photoresist is then deposited to the substrate, exposed, cleaned, until all the layers have been printed or imaged onto the surface. The photolithography process is a critical step within the LCD manufacturing process because panel quality depends on the entire pattern formation. As such, it is extremely sensitive to particles and other forms of contamination. Thus, this process requires a special clean environment, monly referred to as a clean room, and precise control of equipment, chemicals and materials. In the future, this will prove increasingly important as advanced displays that offer greater functionality and higher performance will require increasingly plex and stringent manufacturing capabilities. 4. Dry etch Process The dry etch process uses reactive species, such as atoms or radicals from the gas plasma, to etch away a portion of the object material. When these species react with the material located on the plate, the open region of material transforms into a volatile state and is removed from the matrix. In this process, the reaction velocity is fast and fine patterns can be formed uniformly. P. 18 TFTLCD製作流程?Color Filter Process P. 19 TFTLCD製作流程?Cell Process P. 20 LCD production process can be described as follows: (1) the orientation layer on the lower and upper plate is formed。 (2) the layer is properly positioned so that the liquid crystal can properly align。 (3) the spacer is dispensed, the seal is printed, and the two plates are assembled。 (4) the liquid crystal is injected into the cell through the capillary effect。 and (5) the injection hole is sealed. 1. Printing the Orientation Layer The orientation layer is evenly spread on the pixel area of the upper and lower plate. The polyimide is spread on the drum thinly and evenly and is coated on the rubber plate, which has been patterned