【正文】 ged and transferred to the substrate to be coated。Covering the Surface覆蓋表面The treatments that cover the surfaces include organic coatings and inorganic 。因?yàn)榉磻?yīng)產(chǎn)物不能從晶片表面分離，拋光液中活性成分就不能暴露并與新表面上的原子起反應(yīng)，這會(huì)抑制化學(xué)反應(yīng)。The second step is the process of desorption, that is to say, the resultants gradually separate from the wafer surface and new surface is exposed to polishing chemical reactive rate is smaller, the total removal rate of the wafer is also small。The bined action of polishing pad, abrasive particles and chemical reagents results in material removal and polishing of the wafer mechanical polishing creates flat, damagefree on a variety of brittle materials and it is used extensively on silicon wafers in the manufacture of integrated 、研磨微粒和化學(xué)反應(yīng)物的共同作用導(dǎo)致晶片表面的材料去除并拋光。 。該膜在微觀凹陷處最厚而在微觀凸出處最薄。In basic terms, the object to be electropolished is immersed in an electrolyte and subjected to a direct electrical object is maintained anodic, with the cathodic connection being made to a nearby metal ，要電解拋光的物體被浸沒(méi)在電解液中并且通上直流電。電解拋光工藝使金屬物體的微觀表面平滑和簡(jiǎn)單化。研磨也可采用特殊成型研具在諸如球形物體和透鏡之類的曲面上進(jìn)行。上面是研磨前表面可能的外觀模樣而下面則是研磨后的模樣。The lapped workpiece surface may look smooth but it is actually filled with microscopic peaks, valleys, scratches and surfaces are perfectly minimizes the surface irregularities, thereby increasing the available contact ，其實(shí)布滿著微觀峰、谷、劃痕和凹陷。根據(jù)工件硬度，研磨壓力可在7kPa到140kPa(1到20psi)范圍中取。第一篇：機(jī)械工程英語(yǔ)課文翻譯914第九章 Lapping 研磨Lapping is a finishing operation used on flat and cylindrical lap, shown in , is usually made of cast iron, copper, leather, or 。Lapping has two main , it produces a superior surface finish with all machining marks being removed from the , it is used as a method of obtaining very close fits between mating parts such as pistons and 。幾乎沒(méi)有表面是完全平整的。研磨去除了微觀峰頂從而產(chǎn)生相對(duì)平坦的平臺(tái)。Polishing拋光Polishing is a process that produces a smooth, lustrous surface basic mechanisms are involved in the polishing process:(a)finescale abrasive removal, and(b)softening and smearing of surface layers by frictional heating during 、有光澤表面光潔度的工藝。通過(guò)電解拋光能在金屬表面得到鏡面光潔度。該物體為陽(yáng)極，陰極連接到附近的金屬導(dǎo)體上。Electrical resistance is at a minimum wherever the film is thinnest, resulting in the greatest rate of metallic selectively removes microscopic high points or “peaks” faster than the rate of attack on the corresponding microdepressions or “valleys”.電阻在膜最薄處最小，導(dǎo)致最大金屬分解率。Chemical Mechanical PolishingChemical mechanical polishing is being an increasingly important step in the fabrication of multilevel integrated mechanical polishing refers to polishing by abundant slurry that interacts both chemically and mechanically with the surface being 化學(xué)機(jī)械拋光正在多層集成電路制造領(lǐng)域成為日益重要的步驟?；瘜W(xué)機(jī)械拋光可使多種易碎材料平整且不受損害，因此在集成電路制造中被廣泛地用在硅晶片上。furthermore, the surface degree of finish is not ，即反應(yīng)產(chǎn)物逐漸從晶片表面分離并將新表面暴露給拋光液。The balance and positive effects of two steps decide the total removal rate and its surface degree of 。The inorganic coatings perform electroplatings, conversion coatings, thermal sprayings, hot dippings, furnace fusings, or coat thin films, glass, ceramics on the surfaces of the 、轉(zhuǎn)化層、熱噴涂、熱浸漬、熔爐熔融、或在材料表面涂上薄膜、玻璃、陶瓷。and a cathode(negatively charged electrode)which is the substrate to be (正電極)，是要沉淀材料的來(lái)源；電化學(xué)反應(yīng)是使金屬離子交換并遷移到要覆蓋基體上的中間過(guò)程；以及一個(gè)陰極(負(fù)電極)，即要覆蓋的基體。陽(yáng)極通常為被鍍金屬(假定該金屬能在電解液中腐蝕)。As the current is applied, positive metal ions from the solution are attracted to the negatively charged cathode and deposit on the a replenishment for these deposited ions, the metal from the anode is dissolved and goes into the solution and balances the ionic ，來(lái)自溶液的正的金屬離子被吸引到帶負(fù)電的陰極并沉淀在其上。Thermal spray is a generic term for a broad class of related processes in which molten droplets of metals, ceramics, glasses, and/or polymers are sprayed onto a surface to produce acoating, to form a freestanding nearnetshape, or to create an engineered material with unique ，噴涂到表面產(chǎn)生涂層的熔化小滴可以是金屬、陶瓷、玻璃和/或聚合物，形成獨(dú)立的近似純形或產(chǎn)生具有獨(dú)特性能的設(shè)計(jì)材料。The process for application of thermal spray metal is relatively simple and consists of the following stages.(1)Melting the metal at the gun.(2)Spraying the liquid metal onto the prepared substrate by means of pressed ：(1)在噴槍內(nèi)熔化金屬。ARC—A pair of wires are electrically energized so that an arc is struck across the tips when brought together through a air is blown across the arc to atomise and propel the autofed metal wire particles onto the prepared —當(dāng)一對(duì)金屬絲通過(guò)手持噴槍連到一起時(shí)，通上電橫過(guò)其末端劃燃電弧。ThinFilm Vapor Deposition(PVD)and Chemical Vapor Deposition(CVD)are two most mon types of thinfilm coating ：物理蒸發(fā)沉淀(PVD)和化學(xué)蒸發(fā)沉淀(CVD)是兩種最常見(jiàn)薄膜涂層方法的類型。The thin coating, however, is fragile and not good for wear thermal evaporation process can also coat a very thick, 1mm, layer of heatresistant materials, such as MCrAIY—a metal, chromium, aluminum, and yttrium alloys, on jet engine ，這種薄涂層是易碎的并不適合用于磨損場(chǎng)合。When the substrate is nonconductive, ., polymer, a radiofrequency(RF)sputtering is used can produce thin, less than 3μm(120μin), hard thinfilm coatings, ., titanium nitride(TIN)which is harder than the hardest ，例如聚合物，則采用射頻(RF)濺射代替。與物理蒸發(fā)沉淀在“可見(jiàn)范圍”對(duì)比，化學(xué)蒸發(fā)沉淀能將基體的所有表面都覆蓋?？墒谴斯に囈诟哂?00℃(1300℉)的溫度下才能實(shí)現(xiàn)，這溫度會(huì)軟化大多數(shù)工具鋼。Altering the Surfaces改變表面The treatments that alter the surfaces include hardening treatments, highenergy processes and special 、高能加工和特殊處理。這種技術(shù)也被用于表面硬化產(chǎn)生“表面合金”。它也可以用于表面硬化產(chǎn)生“表面合金”。第十一章 Lathe 車床The Lathe and Its Construction車床及其結(jié)構(gòu)A lathe is a machine tool used primarily for producing surfaces of revolution and flat 。為減振它一般由灰鑄鐵或球墨鑄鐵鑄造而成。主軸通過(guò)裝在主軸箱內(nèi)的齒輪箱驅(qū)動(dòng)。如果采取連續(xù)生產(chǎn)，棒料能通過(guò)此孔進(jìn)給。底座是能在車床床身上沿導(dǎo)軌滑動(dòng)的鑄件，它有一定位裝置能讓整個(gè)尾架根據(jù)工件長(zhǎng)度鎖定在任何需要位置。套筒軸開口端的孔是錐形的，能安裝車床頂尖或諸如麻花鉆和鏜桿之類的工具。The carriage can be moved either manually or mechanically by means of the apron and either the feed rod or the lead (進(jìn)給桿)或絲桿(引導(dǎo)螺桿)機(jī)動(dòng)。When actuating a certain lever, the half nuts are clamped together and engage with the rotating lead screw as a single nut, which is fed, together with the carriage, along the the lever is disengaged, the half nuts are released and the carriage ，剖分螺母夾在一起作為單個(gè)螺母與旋轉(zhuǎn)的絲桿嚙合，并帶動(dòng)拖板沿著