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miconductor Devices 22 中國(guó)科學(xué)技術(shù)大學(xué)物理系微電子專(zhuān)業(yè) 2022/4/14 Semiconductor Devices 23 “摩爾定律 ” :處理器 (CPU)的功能和復(fù)雜性每年 (其后期減慢為 18個(gè)月 )會(huì)增加一倍,而成本卻成比例地遞減。 在技術(shù)上,摩爾定律依然勇往直前 中國(guó)科學(xué)技術(shù)大學(xué)物理系微電子專(zhuān)業(yè) 2022/4/14 Semiconductor Devices 24 Si Substrate Metal Gate Highk TriGate S G D IIIV S Carbon Nanotube FET 50 nm 35 nm 30 nm SiGe S/D Strained Silicon Future options subject to research amp。 change SiGe S/D Strained Silicon Source: Intel 20 nm 10 nm 5 nm5 nm Nanowire Transistor Research Research Options: HighK amp。 Metal Gate Nonplanar Trigate IIIV, CNT, NW 中國(guó)科學(xué)技術(shù)大學(xué)物理系微電子專(zhuān)業(yè) 2022/4/14 Semiconductor Devices 25 中國(guó)科學(xué)技術(shù)大學(xué)物理系微電子專(zhuān)業(yè) 2022/4/14 Semiconductor Devices 26 中國(guó)科學(xué)技術(shù)大學(xué)物理系微電子專(zhuān)業(yè) 2022/4/14 Semiconductor Devices 27 中國(guó)科學(xué)技術(shù)大學(xué)物理系微電子專(zhuān)業(yè) 2022/4/14 Semiconductor Devices 28 中國(guó)科學(xué)技術(shù)大學(xué)物理系微電子專(zhuān)業(yè) 2022/4/14 Semiconductor Devices 29 Building Blocks for Nanoelectronics Carbon Nanotubes Nanowires Quantum Dots Advantages for onedimensional nanostructures: Atomic precision available via chemical synthesis。 Easy to wire up (pared to quantum dots)。 Rich and versatile properties. 中國(guó)科學(xué)技術(shù)大學(xué)物理系微電子專(zhuān)業(yè) 2022/4/14 Semiconductor Devices 30 CNT is a tubular form of carbon with diameter as small as 1 nm. Length: few nm to cm. CNT is configurationally equivalent to a two dimensional graphene sheet rolled into a tube. CNT exhibits: 1. Carrier mobility ~ 100,000 cm2/Vs 2. Young’s modulus over 1 Tera Pascal, as stiff as diamond。 3. Tensile strength ~ 200 GPa. CNT can be metallic or semiconducting, depending on chira