【正文】
lectricity lies between the constant to be small, the hydrogen can enhance the polymer the coefficient of dialectical loss. Making the capacitor the high polymer dielectric medium, determines the electric capacity cape city the change, then obtains the relative humidity. Making the plasma using this principle to gather the legitimate polystyrene film temperature sensor below, it has the characteristic. Measured the wet scope is wide。 The speed of response is quick, is smaller than 1S。 The temperature coefficient is small. The ceramic electric capacity type pressure transmitter is one kind does not have the intermediary fluid the dry type pressure transmitter. Uses the advanced ceramic technology, the heavy film electr onic technology, its technical performance is stable, the year drifting quantity is smaller than %, warm floats is smaller than 177。 enable the optical fiber sensor to have the high band width, the low signal processing voltage, the reliability high, the cost will be low. In semiconductor technology processing method oxygenation, the photo etc hang, the proliferation, the deposition, the plane electron craft, various guides corrosion and steams plates, the sputtering thin film and so on, these have all introduced to the sensor manufacture. Thus has produced each kind of new sensor, like makes the silicon micro sensor using the semiconductor technology, makes the fast response using the thin film craft the gas to be sensitive, the wet sensitive sensor, the use sputtering thin film craft system pressure transmitter and so on.. The Japanese horizontal river pany uses various guides’ corrosion technology to carry on the high accuracy three dimensional processing。s frequency difference correspondence different pressure, measures the pressure with the frequency difference method, may eliminate the error which factor and so on ambient temperature brings. When ambient temperature change, two resonant Liang frequencies and the amplitude variation are same, after two frequency differences, its same change quantity can counterbalance mutually. It’s survey most high accuracy may reach %FS. American Silicon Microstructure Inc.(SMI) the pany develops a series of low ends, linear in % to 65% scope silicon micro pressure transmitter, the lowest full measuring range is (1KPa), it makes take the silicon as the material, has the unique three dimensional structure, the light slight machinefinishing, makes the wheat stone bridge many times with the etching on the silicon diaphragm, when above silicon chip stress, it has the distortion, the resistance produces presses the anti effect but to lose the bridge balance, the output and the pressure bees the proportion the electrical signal. Such silicon micro sensor is the front technology which now the sensor develops, Its essential feature is the sensitive unit volume is a micron magnitude, Is the traditional sensor several dozens, several 1%. In aspect and so on industry control, aerospace domain, biomedicine has the vital ro