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【正文】 y Confidential 長焦距離軸非球面的測量 The Leader in Dynamic Interferometry Interferometry Confidential 長光程測量中的氣流場 32m 光程 , F 5/23/2022 The Leader in Dynamic Interferometry Interferometry Confidential 表面殘差 PVq=89nm： 去除 zernike項后 5/23/2022 The Leader in Dynamic Interferometry Interferometry Confidential ? 口徑 ， 500次測量平均消除氣流影響 加工現場檢測 The Leader in Dynamic Interferometry Interferometry Confidential 氣流的均化與抑止 Confocal test of 3m radius, 300mm diameter spherical mirror l rms 1s repeatability, 5 averages of 25 measurements The Leader in Dynamic Interferometry Interferometry Confidential 輕質復合鏡：半徑 20m, 口徑 振動環(huán)境 The Leader in Dynamic Interferometry Interferometry Confidential 環(huán)境倉內的低溫測試 Figure testing of 300 mm Zerodur mirrors at cryogenic temperatures, Baer amp。 Lotz, SPIE 48224 July 2022 The Leader in Dynamic Interferometry Interferometry Confidential 超音速沖擊波 The Leader in Dynamic Interferometry Interferometry Confidential 強激光的熱過程 The Leader in Dynamic Interferometry Interferometry Confidential 4D動態(tài)干涉儀 小結 ? 泰曼－格林型 PhaseCam P4020： P5030：光學變倍 P6000 IR/NIR ? 共光路菲索型 F2022：短相干光源 F3000： HeNe長相干光源 ? 其它： WaveCam ESPI 多波長干涉儀 … The Leader in Dynamic Interferometry Interferometry Confidential 謝 謝
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