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→ → → → → → → → PDSV → → PD → → → → 2023/4/2 28 , 1. 2. 2023/4/2 29 3. / A B Fortron 4. : Al 5. / : ( ) 2023/4/2 30 : (glow discharge) (Ar) (target), , , , RF ,(glow discharge) (Ar) (target) 2023/4/2 31 (1) (2) (3) (4) (5) (6) (7) 10 (8) 10nm (9) (10) 2023/4/2 32 2023/4/2 33 ( ) AcrylicsPMMA MMAMMA 2023/4/2 34 A 92% B 58 C D E A 86% B C D E 2023/4/2 35 A B C D E A B C D E 2023/4/2 36 A B