中科院微電子機(jī)械系統(tǒng)設(shè)計(jì)(mems)課件(編輯修改稿)
2025-03-25 19:41 本頁(yè)面
【文章內(nèi)容簡(jiǎn)介】 romagic motor after seeing the Westinghouse work ? Energy density scaling for this type of motor indicated performance degradation as dimensions were reduced … ? Materials inpatibility with Stanford’s Microelectronics Lab research focus on electronic devices became a major issue More Recent History ? 1982 Kurt Petersen’s seminal paper titled “Silicon as a Mechanical Material” ? 1984 Howe and Muller at the UC Berkeley developed the polysilicon surface miachining process and used it to produce MEMS with integrated circuits. This technology has served as the basis for many MEMS products ? 1987 Mechanical engineers move into MEMS, starting with Al Pisano … expand applications and technology beyond EE’s chipcentric view ? 1989 – Researchers at UCB and MIT independently developed the first electrostatically controlled micromotors that used rotating bearing surfaces. More Recent History ? DARPA supports large projects at many US universities and labs (1994 – 200?) with a series of outstanding program managers (K. Gabriel, A. , W. C. Tang, C. . Nguyen, J. Evans) ? Commercialization of inertial sensors (AnalogDevices and Motorola polysilicon accelerometers 1991 ? ) ? Microfluidics starts with capillary electrophoresis circa 1990。 micrototal analysis system (mTAS) vision for diagnosis, sensing, and synthesis ? Optical MEMS boom and bust: 1998 – 2023. Polysilicon Microstructures Polysilicon MEMS + NMOS Integration Polysilicon Electrostatic Micromotor ? Selfaligned pinjoint, made possible by conformal deposition of structural and sacrificial layers , Case Western Reserve Univ. Electrostatic CombDrive Resonators Analog Devices Accelerometers ? Integration with BiMOS linear technology ? Lateral structures with intedigitated parallelplate sense/feedback capacitors Analog Devices Inc Accelerometer A Microfabricated Inertial Sensor ? MEMSIC (Andover, Mass.) ? Twoaxis thermalbubble accelerometer ? Technology: standard CMOS electronics with post processing to form thermally isolated sensor structures Surface Micromachining Foundries ? MCNC MUMPS(MultiUser MEMS Process) technology (imported from Berkeley) 1992 ? Sandia SUMMiT (Sandia Ultraplanar Multilevel MEMS Technology) IV and V technologies: 1998 – ? 4 and 5 polySi level processes result: more universities, panies do MEMS MEMS Market and Industry Studies Defense Applications of MEMS MEMS Fluidic Sensor MEMS
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