tft制造原理和流程(ppt72頁(yè))-免費(fèi)閱讀
【正文】 ? 風(fēng)簾 ：主要是吹掉玻璃上 殘 余的 藥 液 ? 風(fēng) 刀：干燥的玻璃的效果。 WET簡(jiǎn)介 各工藝單元功能 ARRAY工藝流程及設(shè)備 WET簡(jiǎn)介 工程概念圖 ARRAY工藝流程及設(shè)備 光阻剝膜 DEY簡(jiǎn)介 —干刻 ARRAY工藝流程及設(shè)備 DEY簡(jiǎn)介 —設(shè)備原理 ARRAY工藝流程及設(shè)備 壓力控制 氣體供給 控制臺(tái) 除害裝置 （ scrubber） 汽缸 cabi Gas box 上部 電極 氣體吹出 ＲＦ 電源 （ＰＥ 場(chǎng)合 ） 下部 電極 APC閥 泵 流量 控制 RF power 壓力檢 出 真 空排 氣 特氣對(duì)應(yīng) ＭＦＣ ＭＦＣ ＭＦＣ APC 控制 C/M 控制 C/M 等離子體 工藝腔體 M. Box DEY簡(jiǎn)介 —工程示意圖 ARRAY工藝流程及設(shè)備 PHOTO曝光顯影蝕刻基本概念 ARRAY工藝流程及設(shè)備 PHOTO顯影 PHOTO顯影 ARRAY工藝流程及設(shè)備 ARRAY工藝流程及設(shè)備 TEST – AOI(ADIAEI) – Auto optical inspection configuration 自動(dòng)光學(xué)檢查 ARRAY工藝流程及設(shè)備 ← 2160mm → ← 2400mm → 3GB44unit=132GB G８ Size The CCD sensor detect the substrate, Image by the process unit. Defect can be reviewed precisely CCD探測(cè)產(chǎn)品表面 ,生成的圖象通過處理單元 ,缺陷會(huì)精確的反映出來(lái) . AOI – Auto optical inspection configuration 自動(dòng)光學(xué)檢查設(shè)備 圖形處理單元 ARRAY工藝流程及設(shè)備 O/S test design ? Panel structure for O/S Test ? Every data line extands ? out of the active area connect with O/S pad ? On the other side all data line connected together by Shorting bar ARRAY工藝流程及設(shè)備 Array Tester ? Test station ? Electrical cabi ? Operator console ? Environmental Enclosure ARRAY工藝流程及設(shè)備 Array tester Array tester Using instructions in the selected processing recipe, the pattern generator sends test signals to the probe frame. The illuminator is turned on, a bias voltage applied to the modulator and an image captured by the CCD camera. The image is sent to the image processing puter (IPPC) and panel flaws are identified and stored in the defect file by the Sun host puter. Array tester optical part Light from the illuminator is reflected by the modulator and the image captured on the CCD camera. The image is then processed and analyzed for defects. TESTTEG TESTER TESTTEG Measurement Structure Measurement Structure TEST Array laser repair TEST Array laser configuration ? LASER OSCILLATOR : DIODEPUMPED QSWITCHED ? LASER MATERIAL : Nd:YAG ? WAVELENGTH
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