微機電系統(tǒng)ppt課件(已修改)
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【正文】 CHAPTER 2. Micro fabrication technology 1. Semiconductor industry and MEMS materials. 1) Introduction to modern Semiconductor industry Semiconductor industry is playing more and more important role in modern society. We can say, no semiconductor industry, no modern civilization! 2) Commonly used MEMS materials Category Material Property or application Metal Au,Al,Cu,Ni,Cr Conductor Semiconductor Silicon Structure, semiconductor Polycrystalline silicon Structure, semiconductor Singlecrystalline silicon Structure, Anisotropic etch properties GaAs Structure, optical properties Quartz Crystalline SiO2 Substrate, structures Polymer ParyleneC Nafion Polymeric materials Nonmetals Diamond(C) structure 3) Crystal structure of Silicon 4) Crystal planes 5) Types of silicon wafer ① Geometric representation of crystal Si Definition: ―( )‖ specific plane ―{ }‖ equivalent plane ―[ ]‖ specific direction ― ‖ equivalent direction ② Wafers are classified as how they are doped (ntype, ptype), and how the Si crystals are oriented as seen from the top of the shape of the wafers are cut differently. 6) Why do we choose silicon as a MEMS structural material? Semiconductors are a class of materials which have the unique property that their electrical conductivity can be controlled over a very wide range by the introduction of dopants. While this property can easily be observed in crystalline, polycrystalline,
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