【正文】 中北大學(xué) 20xx屆畢業(yè)設(shè)計(jì)說明書 摘 要 隨著我國社會(huì)經(jīng)濟(jì)的發(fā)展，現(xiàn)代企業(yè)建設(shè)發(fā)展十分迅速，同時(shí)也對(duì)企業(yè)的基礎(chǔ)設(shè)施建設(shè)提出了更高的要求。而廠礦企業(yè)對(duì)供水供液的要求也越來越大，在供液系統(tǒng)方面面臨的矛盾和問題日益突出。隨著企業(yè)生產(chǎn)對(duì)供液質(zhì)量和供液系統(tǒng)可靠性要求的不斷提高，利用先進(jìn)的自動(dòng)化技術(shù)、控制技術(shù)，設(shè)計(jì)出高性能、高節(jié)能、能適應(yīng)供液系統(tǒng)復(fù)雜環(huán)境的恒壓、穩(wěn)流等優(yōu)良的供液系統(tǒng)成為必然趨勢(shì)。 本課題 針對(duì)芯片拋光車間生產(chǎn)的特點(diǎn)，對(duì)芯片拋光車間的供液系統(tǒng)管路進(jìn)行了研究，采用合理方案對(duì)供液系統(tǒng)進(jìn)行了優(yōu)化設(shè)計(jì)。相對(duì)于傳統(tǒng)的供液管路系統(tǒng)，本課題主要在供液原理 、空間布局，設(shè)備選型等方面進(jìn)行了改良，并用相關(guān)軟件進(jìn)行了空間布局和結(jié)構(gòu)安裝圖的繪制。 關(guān)鍵詞： 芯片拋光車間 ， 供液管路 , 恒壓 ，穩(wěn)流 中北大學(xué) 20xx屆畢業(yè)設(shè)計(jì)說明書 ABSTRACT With the development of society and economy, Not only the modern business building develop very rapidly, but also the requirements on corporate infrastructure put forward higher. The requirements of industrial enterprises for water supply is also growing and Contradictions and problems in the hydraulic system faced increasingly prominent. The flow of fluid supply system that use advanced automation technology, control technology , has a highperformance, high energy ,and be able to adapt to the plex environment of the fluid supply system constantly, steadly has bee an inevitable trend. This topic, for the chip polishing workshop production characteristics , the liquid supply system piping chip polishing workshop were studied and using reasonable solutions for the fluid supply system optimized design . Compared to conventional liquid supply piping system, the main topic was modified in principle for the fluid , spatial layout, equipment selection, etc. At last , draw out the spacerelated software insallation diagram of the layout and structure. Keyword: chip polishing workshop , liquid pipeline , constant , steady flow 中北大學(xué) 20xx屆畢業(yè)設(shè)計(jì)說明書 第 I 頁 共 II 頁 目錄 1 緒論 ............................................................................................................................ 1 課題的工程背景及意義 ................................................................................... 1 國內(nèi)外發(fā)展研究現(xiàn)狀與發(fā)展趨勢(shì) ................................................................... 1 本說明書的主要研究?jī)?nèi)容 ............................................................................... 5 芯片拋光車間供液系統(tǒng)管路的空間布局設(shè)計(jì) ................................... 5 供液管路系統(tǒng)及其配套設(shè)施的設(shè)計(jì) ................................................... 5 供液方式設(shè)計(jì) ....................................................................................... 5 系統(tǒng)選材 ............................................................................................... 6 芯片拋光車間供液系統(tǒng)布局圖 ........................................................... 6 課題研究設(shè)計(jì)流程圖 ....................................................................................... 6 2 總體方案設(shè)計(jì) ............................................................................................................ 7 空間布局設(shè)計(jì) .................................................................................................. 7 系統(tǒng)主要參數(shù)設(shè)計(jì) ........................................................................................ 10 供液方式設(shè)計(jì) ................................................................................................. 10 供、排液管同程循環(huán)系統(tǒng)設(shè)計(jì) ......................................................... 10 循環(huán)水泵多臺(tái)并聯(lián)設(shè)計(jì) ..................................................................... 11 變頻調(diào)速技術(shù) ..................................................................................... 12 控制系統(tǒng)工作原理 ............................................................................. 12 系統(tǒng)安裝注意事項(xiàng) ......................................................................................... 13 總體安裝特別注意事項(xiàng) ..................................................................... 13 管道安裝 ............................................................................................. 13 變頻器安裝 ......................................................................................... 14 本章小結(jié) ........................................................................................................ 14 3 管道系統(tǒng)選型 ........................................................................................................... 15 流量與管徑、壓力、流速的一般關(guān)系 ......................................................... 16 管徑、壓力與流速 計(jì)算 ................................................................................ 17 本章小結(jié) ......................................................................................................... 19 中北大學(xué) 20xx屆畢業(yè)設(shè)計(jì)說明書 第 II 頁 共 II 頁 4 配套系統(tǒng)的選型 ....................................................................................................... 20 泵的選型 ......................................................................................................... 21 閥門的選型 .................................................................................................... 25 傳感器的選型 ................................................................................................. 26 變頻器的選型 ................................................................................................. 28 在選擇變頻器的容量時(shí)最基本的原則 ............................................. 28 加速時(shí)間與變頻器容量選擇的關(guān)系 ................................................. 28 本章小結(jié) ......................................................................................................... 28 5 總結(jié) ........................................................................................................................... 29 參考文獻(xiàn) ...................................................................................................................... 30 致 謝 ............................................................................................................................ 33 中北大學(xué) 20xx屆畢業(yè)設(shè)計(jì)說明書 第 1 頁 共 33 頁 1 緒論 課題的工程背景及意義 隨著我國社會(huì)經(jīng)濟(jì)的發(fā)展，現(xiàn)代企業(yè)建設(shè)發(fā)展十分迅速，同時(shí)也對(duì)企業(yè)的基礎(chǔ)設(shè)施建設(shè)提出了更高的要求?，F(xiàn)在，芯片拋光 車間主要采用雙面拋光工藝作為芯片加工的主要后續(xù)加工方法。精密的雙面拋光的加工精度和加工效率與加工環(huán)境、拋光轉(zhuǎn)速、拋光運(yùn)行模式、拋光壓力、拋光液溫度、流量等情況有著直接關(guān)系。因此 ,獲得超光滑表面的芯片必須有超精密機(jī)床和合適的拋光工藝。經(jīng)研究，不同拋光工藝參數(shù) :