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Gijntherodt, Rev. Sci. Instrum. 63, 3909(1992)科學儀器評論刊物版權歸美國物理研究所(AIP)所有。更多信息,請見原文:REVIEW OF SCIENTIFIC INSTRUMENTS 80, 085104 2009A simple, pact, and rigid piezoelectric step motor with large step sizeQi Wang1 and Qingyou Lu1,2,a1Hefei National Laboratory for Physical Sciences at Microscale, University of Scienceand Technology of China, Hefei, Anhui 230026, People’s Republic of China2High Magnetic Field Laboratory, Chinese Academy of Sciences, Hefei, Anhui 230031,People’s Republic of ChinaReceived 11 June 2009。 published online 14 August 2009We present a novel piezoelectric stepper motor featuring high pactness, rigidity, simplicity, andany direction operability. Although tested in room temperature, it is believed to work in lowtemperatures, owing to its loose operation conditions and large step size. The motor is implementedwith a piezoelectric scanner tube that is axially cut into almost two halves and clamp holds a hollow shaft inside at both ends via the spring parts of the shaft. Two driving voltages that singly deform the two halves of the piezotube in one direction and recover simultaneously will move the shaft inthe opposite direction, and vice versa. 169。200 V maximum operating voltages), respectively. A cut(with diamond saw)through two opposite boundaries of the quadrants is made from the sapphire ring at one end of the PST into about 92% of the tube length toward the other end. The uncut sapphire ring is the base ring, whereas the other is cut into two semi rings which are called clamping semi rings(will clamp hold a mobile HS).Each pair of the neighboring electrodes with no cut in between is wired together, resulting in two semicylindrical electrodes, one is arbitrarily called the ?rst electrode (E1)for convenience and the other, the second electrode(E2).The two halves of the PST that E1 and E2 control are abbreviated as P1 and P2, respectively.The moving part of the motor is a titanium HS that is inserted into the PST as shown in (a).We have studied a circular and a square HS as illustrated in (b). For the circular one(length=45mm,inner diameter=, and outer diameter= mm which can pass through the sapphire rings at the PST ends with a small gap of mm),a wire cut through the axis is made from each end toward the other end with the cutting planes perpendicular to each two cuts do not go through the entire HS and a small length of mm remains uncut at each end. The pair of the HS cut slits having the opening toward the same direction as that of the PST slits is arranged in the same plane with the PST slits. A stronger pression spring is secured in the HS at one end, pushing the HS to open wider and press against the clamping semi rings with forces N1 and N2,respectively,whereas a weaker pression spring in the HS at the other end presses the HS on the base ring with a total pressing force three pressing forces N1,N2,and Nbr are set roughly equal by the above stronger and weaker pression springs. Accordingly, the maximum static friction forces on the HS due to these three pressing forces are approximately equal in value(directions may be opposite as discussed below)if equal friction coef?cients are assumed..(a)The structure of our piezomotor。(2)the frictions are better de?ned and more stable。(4)the smallest gap between the square HS and the sapphire rings is easier to tweak by grinding(smaller gap will lead to a larger travel range). schematic diagram for deriving the range of motion.Apparently, the clamping forces N1,N2,and Nbr do not remain constant when the HS moves, thus limiting its range of range of motion for the square HS can be derived as follows. Referring to in which FS is the force produced by the spring and LB and LC stand for the distances from the spring to the base ring and to the clamping semi rings, respectively, the lever law leads to:LB(LC+LB) and LC(LC+LB).Because N1=N2 and we need N1+N2Nbr for the HS to walk, this means that LBLC should be satis?ed. Since the HS cannot move if LC=0, the range of motion is ?nally determined by 0LCLB. In our design, LC+LB≈30mm(the length of the PST), we exp