【正文】
Optoelectronics Engineering. HFUT Prof. K. C. Fan 三坐標(biāo)測量結(jié)構(gòu)實物圖 三坐標(biāo)測量結(jié)構(gòu)原理 國內(nèi)外研究概況 ( Tokyo Univ. — NanoCMM ) Nano Measurement Lab. School of Instrument Science and Optoelectronics Engineering. HFUT Prof. K. C. Fan 探頭系統(tǒng) 國內(nèi)外研究概況 ( Tokyo Univ. — NanoCMM ) Nano Measurement Lab. School of Instrument Science and Optoelectronics Engineering. HFUT Prof. K. C. Fan Source: 1. Nanotechnology , R1R6, 20xx. , 2. Annals of the CIRP Vol. 48/1/1999 , 3. 國內(nèi)外研究概況 (NPL) — Small CMM (SCMM) ?測量范圍 : 50*50*50 mm ?干涉儀測量各軸位移 ?探頭直徑 : 1mm ?分辨率 : 3nm ?測量不確定度 : 50nm Nano Measurement Lab. School of Instrument Science and Optoelectronics Engineering. HFUT Prof. K. C. Fan 國內(nèi)外研究概況 (NPL) — Small CMM (SCMM) Nano Measure