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of Instrument Science and Optoelectronics Engineering. HFUT Prof. K. C. Fan Tokyo University — NanoCMM NPL/UK — Small CMM (SCMM) Eindhoven Univ— HighPrecision 3DCMM PTB/Germany — Special CMM BUPE/Korea — Ultra Precision CMM (UPCMM) Others: USA NIST、 North Carolina amp。 MIT、 SIOS/Ilmenau Univ. 國內(nèi)外研究概況 Nano Measurement Lab. School of Instrument Science and Optoelectronics Engineering. HFUT Prof. K. C. Fan Tokyo University — NanoCMM Source: Takamasu Lab. 國內(nèi)外研究概況 Nano Measurement Lab. School of Instrument Science and Optoelectronics Engineering. HFUT Prof. K. C. Fan 摩擦驅(qū)動(dòng)系統(tǒng)結(jié)構(gòu)與原理圖 國內(nèi)外研究概況 ( Tokyo Univ. — NanoCMM ) Nano Measurement Lab. School of Instrument Science and