潔凈空氣流設(shè)計及其經(jīng)濟意義(參考版)
2025-07-24 12:18本頁面
【正文】 Sons,Baffins lane,Chichester,West Sussex, 0471942049.,de Almeida,.,Energy Efficiencvin California Laboratory Type Berkeley National Laboratory . Benchmaiking for Fourteen Berkeley National Laboratory Report ., Saving System,for Air Conditioning of clean Room for semiconchtctor Factory (Estimation of FMU System).Oki Technical ReviewVol,63:special Issue on Global Environment:UDC[:].,and Performance of Cleanroom Environmental of ESTECH 48th Annual Technical Meeting and the 16th ICCS Inthernational Symposium On Contamination , 28May 1:Institute of Environmental Seiences and t echnology(IEST). Standard 209E* Particulate Cleanliness Classes in Cleanrooms and Clean Services Administration(GSA),GSA Service ＆D . 2001.. 1995. ASHRAE Handbook: HVAC Society of Air Conditioning . Institute of Environmental Sciendces and Technology (IEST). in Cleanroom Remended Practice ().The Institute of Environmental Sciences and East Northwest 60056—. Clean Room HVAC Journal,(8): 2001. Cleanroom Airflows partⅡ:The messy Well 2002. Air Velocity Cuts Costs 2000. 口。此外,在DE—AC03—76SF00098合同號項目下的該項工作還得到了美國能源部建筑技術(shù)辦公室能源效率與可再生能源主任助理的支持。圖3. 1,000,000立方米/千瓦小時潔凈室循環(huán)通風系統(tǒng)的年風機電費10 致意 本論文是根據(jù)以前一個研究項目(LBNL49112號報告)的數(shù)據(jù)庫的進一步分析而寫成。執(zhí)行現(xiàn)行氣流設(shè)計范圍指南應(yīng)有些保留,以改進潔凈室各系統(tǒng)的能效,同時有效地控制污染,這將給工業(yè)帶來好處,既節(jié)省了直接投資,也節(jié)省了整個使用周期的費用,最終改善了商業(yè)底線。仔細認真地安排潔凈室各種系統(tǒng)和工藝布置,即可長期地影響著空氣系統(tǒng)的能源利用。 設(shè)計合適的循環(huán)風量是潔凈室環(huán)境系統(tǒng)性能滿意和有效
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