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【正文】 Group Meeting DongMing Fang April 18, 2023 微電子學(xué)研究院 微米納米加工技術(shù)國(guó)家級(jí)重點(diǎn)實(shí)驗(yàn)室 Group Meeting DongMing Fang April 18,2023 Work in the last two weeks Completed … 1 Read … 2 Read … 3 Read … 4 Downloaded … 5 Conceiving … 6 微電子學(xué)研究院 微米納米加工技術(shù)國(guó)家級(jí)重點(diǎn)實(shí)驗(yàn)室 Group Meeting DongMing Fang April 18,2023 Work in the last two weeks ? Completed PPT file for oral speech In English Proper Contents About 35 Pages 微電子學(xué)研究院 微米納米加工技術(shù)國(guó)家級(jí)重點(diǎn)實(shí)驗(yàn)室 Group Meeting DongMing Fang April 18,2023 Work in the last two weeks ? Thesis draft written by… Design … 1. Fabrication … 2. Measured … 3. 微電子學(xué)研究院 微米納米加工技術(shù)國(guó)家級(jí)重點(diǎn)實(shí)驗(yàn)室 Group Meeting DongMing Fang April 18,2023 Work in the last two weeks ? Processes Information Storage PECVD:SiO2, Si3N4, SiC Sputter: Ti, Au, Pt, Al, Cr, W, Pb LPCVD: PolySi, SiO2,Si3N4 Si Oxidation:HO,O2,H2O Membrane Ion Injection:As+,P+,B+,BF2+ Diffusion: P+,B+ Adjusting ICP: Si, Ti/Al, Cr/Cu, Cr/Pt, Ti/Pt/Au, Pyrex, SiO2 RIE:Si,SiO2,Si3N4, SiO2, Solutions: KOH, BHF, HF, H3PO4 Etching Anode (electrostatic), AuSi, hot Bonding 微電子學(xué)研究院 微米納米加工技術(shù)國(guó)家級(jí)重點(diǎn)實(shí)驗(yàn)室 Group Meeting DongMing Fang April 18,2023 Work in the last two weeks 1. Silicon Microfabrication : ….. 2. MEMS Reliability: ….. 3. NSFC Requisition : …. 4. Other: Published papers of IME ? References and PPT files 微電子學(xué)研究院 微米納米加工技術(shù)國(guó)家級(jí)重點(diǎn)實(shí)驗(yàn)室 Group Meeting DongMing Fang April 18,2023 Work in the last two weeks ? Safety and Operation Handbook Safety Exit, Fire extinguisher, Shower equipment, Eye bath system MSDS Health hazard, Fire hazard, Specific hazard, Reactivity Etching Room 600m2， Etching platform, Shelf, Reagent chemicals 微電子學(xué)研究院 微米納米加工技術(shù)國(guó)家級(jí)重點(diǎn)實(shí)驗(yàn)室 Group Meeting DongMing Fang April 18,2023 Future work in the next week Simulate …. Read … Learn … 微電子學(xué)研究院 微米納米加工技術(shù)國(guó)家級(jí)重點(diǎn)實(shí)驗(yàn)室 Group Meeting DongMing Fang April 18,2023 Work in the last week Passed the … 1 Read references … 2 Simulated and analyzed … 3 Design the fabrication … 4 微電子學(xué)研究院 微米納米加工技術(shù)國(guó)家級(jí)重點(diǎn)實(shí)驗(yàn)室 Group Meeting DongMing Fang April 18,2
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