【正文】
備,會(huì)使集成度更高, 10001100 5. Conclusion 1. We successfully fabricated microthermocouples having a HAR of and a high integration density of 620 TCs cm–2 with high mechanical toughness. 2. Method: Combined a photosensitive glass mold, ASD and HIP. 3. It is expected that the proposed fabrication method will achieve a μTEG having an aspect ratio of 7 that will obtain an opencircuit voltage efficiency of V cm–2 and an output power efficiency of –2 by energy harvesting from a human body.